Carl Zeiss Microscopy Gmbh

Carl Zeiss Nts Gmbh

Wolfram Bühler

Daniel Fischer

Michael Albiez

Ulrike Zeile

Camille Stebler

Holger Dömer

Carl Kübler

Elke Haustein

Matthias Lang

Markus Fischer

Heinz Wanzenböck

Producing images of a specimen includes introducing a specimen into a specimen chamber of a particle-beam device, selecting a specific position on the surface of the specimen, supplying a contrast-agent precursor on the specific position, providing a particle beam and/or a light beam, guiding the particle beam and/or the light beam onto the specific position, applying a contrast-agent layer to the specific position as a result of the interaction of the particle beam and/or the light beam with the contrast-agent precursor, leaving the contrast-agent layer on the surface of the specimen for a predetermined amount of time. During the predetermined amount of time, a first part of the contrast-agent layer diffuses into the specimen and a second part of the contrast-agent layer remains on the surface of the specimen. The specimen is imaged using an optical device and/or a particle-optical device and/or using the particle beam.

Producing images of a specimen

An aperture unit for a particle beam device, in particular an electron beam device, is disclosed. Deposit supporting units are arranged at the aperture unit, with which deposit supporting units contaminations can be bound in such a way that the contaminations can no longer deposit at an aperture opening of the aperture unit. Coatings which can be arranged on the aperture unit make it possible to reduce interactions which cause contaminations to deposit at the aperture opening.

Aperture unit for a particle beam device

Growing community of inventors

Hermaringen, Germany

Wolfram Bühler