Robert Boschgmbh

Wolfram Bauer

Rainer Willig

Burkhard Kuhlmann

Udo-Martin Gomez

Christoph Lang

Reinhard Neul

Jochen Franz

Joerg Hauer

Christian Doering

Udo Bischof

Michael Veith

Johannes Classen

Gerhard Wucher

Markus Lutz

Karsten Funk

Johannes Artzner

Michael Fehrenbach

Andreas Thomae

Ermin Esch

Siegbert Goetz

Mathias Reimann

Jens Mohaupt

Hans-Dieter Schwarz

Jens Frey

Dieter Maurer

Matthias Meier

Michael Baus

Thomas Mayer

Georg Pfaff

Rainer Erhardt

Markus Brockmann

Emma Abel

Udo Gomez

Arnd Gangei

Gregor Wetekam

Patrick Goerlich

Buckhard Kuhlmann

Wolfgang Fuerst

Frank Schmid

Riad Stefo

Burhard Kuhlmann

A yaw rate sensor () includes a movable mass structure () and a drive component () which is suitable for setting the movable mass structure () in motion (), and an analysis component () which is suitable for detecting a response () of the movable mass structure () to a yaw rate (&#x3a9;). A method for functional testing of a yaw rate sensor () includes the following steps: driving a movable mass structure (), feeding a test signal () into a quadrature control loop () at a feed point () of the quadrature control loop (), feeding back a deflection () of the movable mass structure (), detecting a measure of the feedback of the movable mass structure (), and reading out the response signal () from the quadrature control loop (). In the yaw rate sensor () and also in the method, the readout of the response signal () in relation to a processing direction () of the test signal () is provided between a feed point () for a test signal () and an actuator () for feeding back a deflection () of the movable mass structure ().

Self-test for yaw rate sensors

A sensor device includes: a sensor module mounted on a conductor board; a sensitive element which is sensitive to a variable; a self-test control unit implementing a self-test program, the self-test control unit applying a self-test variable to the sensitive element, taking the self-test program into account; a detection unit detecting a characteristic of the sensitive element which is altered as a result of the applied self-test variable and providing an actual self-test response, taking the altered characteristic into account; and a comparator unit provided on or in the sensor module, the comparator unit comparing the actual self-test response to at least one specified setpoint self-test response and providing comparative information.

Sensor device with self-test capability

In a system based on an analog-digital converter (ADC) having an analog input signal and at least one quantization threshold, the analog-digital converter (ADC) includes an arrangement for varying the at least one quantization threshold.

Analog-digital converter

An oscillating circuit includes an analog oscillation element. The oscillating circuit includes at least one analog-to-digital conversion device. A method is for operating an oscillating circuit, in which a mechanical oscillator oscillates at a natural frequency. The oscillation amplitude is measured and digitized. A digital control signal is generated from this with the aid of a digital amplitude controller. A driving signal is generated, in turn, from the digital control signal, the driving signal driving the mechanical oscillator with the aid of a drive unit. This control loop stabilizes the oscillation amplitude.

Oscillating circuit having an analog oscillating element

A delta sigma modulator includes an oscillatory system having a natural frequency and an electronics and a control loop which acts upon the electronics from the oscillatory system and again upon the oscillatory system from the electronics. The control loop provides that a gain in the control loop demonstrates a peaking in a frequency range around the natural frequency of the oscillatory system.

Delta sigma modulator

A micromechanical rotation rate sensor has a seismic mass and driving devices which cause a driving vibration of the seismic mass in a first direction x. The rotation rate sensor has measuring devices which measure a deflection of the seismic mass in a second direction y, and generate a deflection signal. The deflection includes a measurement deflection caused by a Coriolis force and an interference deflection, the interference deflection being phase-shifted with respect to the measurement deflection by 90&#xb0;. Compensation devices are provided at the seismic mass to reduce the interference deflection. Regulation devices are provided, to which the deflection signal is supplied as an input variable, which demodulate an interference deflection signal from the deflection signal, and which generate a compensation signal from the interference deflection signal, which is supplied to the compensation devices.

Micromechanical rotation rate sensor having error suppression

A rotation rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated above a surface of a substrate; the Coriolis element being able to be induced to vibrate in parallel to a first axis (X); an excursion of the Coriolis element being detectable, based on a Coriolis force in a second axis (Y), which is provided to be essentially perpendicular to the first axis (X); the first and second axes (X, Y) being provided parallel to the surface of the substrate, wherein force-conveying means are provided, the means being provided to convey a dynamic force effect between the substrate and the Coriolis element.

Rotation rate sensor

A rotational rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated over a surface of a substrate; a driving arrangement being provided, by which the Coriolis element is induced to vibrations parallel to a first axis; a detection arrangement being provided, by which an excursion of the Coriolis elements is detectable on the basis of a Coriolis force in a second axis that is provided to be essentially perpendicular to the first axis; the first and second axis being parallel to the surface of the substrate; sensor elements that are designated to be at least partially movable with respect to the substrate being provided; a force-conveying arrangement being provided; the force-conveying arrangement being provided to convey a static force effect between the substrate and at least one of the sensor elements.

Rotational rate sensor

A yaw-rate sensor having a resonant driving frequency and a resonant Coriolis frequency. In addition, the yaw-rate sensor has at least one operating voltage, of which the resonant Coriolis frequency is a function. The resonant Coriolis frequency is adjusted to the resonant driving frequency with the aid of an adjustment voltage. A change in the resonant Coriolis frequency as a result of a change in the operating voltage may be compensated for, in that a suitably changed adjusting voltage may be produced from a compensation circuit.

Rate-of-rotation sensor having frequency adjustment

An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.

Micromechanical rotational rate sensor

A device is described for generating an electric voltage by which a body of a capacitive and/or inductive sensor capable of vibration, such as a capacitive micromechanical rotational rate sensor in particular, is induced to vibrate. In order to reduce the manufacturing cost of the sensor, a voltage generating device is provided which induces a constant mechanical deflection of the body capable of vibration, this deflection being independent of the manufacturing tolerances of the sensor.

Sensor-independent oscillation amplitude control

A yaw-rate sensor is proposed having a first and a second Coriolis element ( ) which are arranged side-by-side above a surface ( ) of a substrate. The Coriolis elements ( ) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements ( ) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements ( ) are coupled by a spring ( ) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.

Rotation speed sensor

A method and an apparatus for synchronous demodulation of the multiply modulated rotation rate signal of a rotation rate sensor which comprises a spring-mass system that oscillates at its natural resonant frequency, and at least one capacitor for ascertaining a Coriolis effect acting on the spring-mass system or a rotation rate, the rotation rate being ascertained by a time-variable capacitance change, brought about by the rotation rate, of the at least one capacitor by multiple demodulation of a multiply modulated electrical signal that comprises a time-variable first electrical signal and a second electrical signal, overlaid thereon, at the natural resonant frequency of the rotation rate sensor, the amplitude of the second electrical signal of the time-variable capacitance change of the at least one capacitor being correspondingly modulated. To substantially reduce the outlay for synchronous demodulation, the first electrical signal is generated so that it exhibits a time-invariant phase relationship to the natural resonant frequency of the rotation rate sensor.

Method and apparatus for synchronous demodulation of multiply modulated signals

A yaw-rate sensor including a first and a second Coriolis element that are arranged side-by-side above a surface of a substrate. The Coriolis elements are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements occur in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.

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Tuebingen, Germany

Wolfram Bauer