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Forschungszentrum Julich Gmbh

Wolfgang Theiss

Michael Gotz Berger

Hans Luth

Markus Th&ouml;nissen

Michael Kr&uuml;ger

Hans L&uuml;th

Walter Lang

Markus Thonissen

R&uuml;diger Arens-Fischer

Michael Kruger

Robert Romestain

Stefan Hilbrich

Gilles Lerondel

An interference filter having a layer with an area consisting of a porous material extending from the surface of the layer to the interior, the dimensions of the porous layer area in a direction normal to the layer surface have different values to provide for varying reflection or, respectively, transmission characteristics.

Method for the production of a porous layer

A process for producing a structured area of porous silicon on a substrate, in which silicon is etched and structured by means of illumination, includes selectively aiming the illumination during or after the formation of the porous silicon directly at a selected area of a p-doped substrate in order to effect etching and structuring of the porous silicon in another area. A device for carrying out the process includes an illuminating system for supporting the etching process and for structuring the porous silicon, in which the illuminating system is selectively aimed during or after the formation of the porous silicon directly at a selected area of p-doped substrate in order to effect etching and structuring of the porous silicon in another area.

Process and device for the lighting-supported structuring of porous

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Aachen, Germany

Wolfgang Theiss