Ald Vacuum Technologies Gmbh

Wolfgang Rieth

Helmut Eberhardt

Pavel Seserko

Juergen Hotz

Joerg Wittich

Manfred Kirschner

Jürgen Hotz

Jörg Wittich

An apparatus for coating substrates with a coating material is disclosed. The apparatus includes a frame, a crucible arrangement including a first crucible and a second crucible disposed offset from one another in a horizontal plane, where the crucible arrangement is disposed on the frame. At least one first shaft is associated with the first crucible and at least one second shaft is associated with the second crucible, where the at least one first and second shafts are disposed in the frame beneath the first and second crucibles, respectively. A first lifting device is associated with the at least one first shaft and a second lifting device is associated with the at least one second shaft, where the first and second lifting devices are disposed in the frame. The frame is linearly displaceable in the horizontal plane.

Apparatus for coating substrates using the EB/PVD method

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Gelnhausen, Germany

Wolfgang Rieth