Fuji Xerox Co., Ltd.

Tokyo Electron Limited

Wolfgang Polak

Sanjeev Kaushal

Sukesh Janubhai Patel

Orion Wolfe

Patrick Chiu

Andreas Girgensohn

Aaron Archer Waterman

Qiong Liu

Kenji Sugishima

Maribeth Joy Back

Frank M Shipman, Iii

Eleanor Rieffel

Kazumasa Murai

Jeffrey Huang

Volker Roth

Surapong Lertsithichai

W Brian Arthur

Xiaohua Sun

Robert Filman

Jessie Burger

A system and method autonomously determines the impact of respective tool parameters on tool performance in a semiconductor manufacturing system. A parameter impact identification system receives tool parameter and tool performance data for one or more process runs of the semiconductor fabrication system and generates a separate function for each tool parameter characterizing the behavior of a tool performance indicator in terms of a single one of the tool parameters. Each function is then scored according to how well the function predicts the actual behavior of the tool performance indicator, or based on a determined sensitivity of the tool performance indicator to changes in the single tool parameter. The tool parameters are then ranked based on these scores, and a reduced set of critical tool parameters is derived based on the ranking. The tool performance indicator can then be modeled based on this reduced set of tool parameters.

Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturing

Systems and techniques to facilitate tool failure analysis associated with fabrication processes are presented. A monitoring component determines a candidate tool failure associated with one or more fabrication tools based on sensor data generated by a set of sensors associated with the one or more fabrication tools. A signature component generates a signature dataset for the candidate tool failure based on data associated with the one or more fabrication tools. A comparison component compares the candidate tool failure to at least one previously determined tool failure based on the signature dataset and at least one other signature dataset associated with the at least one previously determined tool failure.

Tool failure analysis using space-distorted similarity

A system and method autonomously determines the impact of respective tool parameters on tool performance in a semiconductor manufacturing system. A parameter impact identification system receives tool parameter and performance data for one or more process runs of the semiconductor fabrication system and generates a separate function for each tool parameter characterizing the behavior of a tool performance indicator in terms of a single one of the tool parameters. Each function is then scored according to how well the function predicts the behavior of the tool performance indicator, or based on a determined sensitivity of the tool performance indicator to changes in the single tool parameter. The tool parameters are then ranked based on these scores, and a reduced set of critical tool parameters is derived based on the ranking. The tool performance indicator can then be modeled based on this reduced set of tool parameters.

The subject disclosure relates to automatically learning relationships among a plurality of manufacturing tool parameters as applied to arbitrary semiconductor manufacturing tools and a graphical user interface that is supported, at least in part, by an autonomous learning system. The graphical user interface can create one or more matrixes based on received data and can further generate additional matrices by transforming the one or more matrixes. A series of windows can be output, wherein the series of windows, provide performance analysis that comprises a matching between a focus chamber and a reference chamber. In an aspect, the focus chamber and the reference chamber can be different chambers. In another aspect, the focus chamber and the reference chamber can be the same chamber, which provides analysis of the deterioration in performance of the same chamber over time.

Biologically based chamber matching

A system that assures a user that two specific devices have exchanged information correctly over an insecure communication channel. In a typical application, the channel would be a wireless network connection and the information would consist of the public keys of the two devices. The exchanged public keys would subsequently be used to secure any further communication between the two devices. The system requires that both devices have an output modality interpretable by a human. One of the devices must have an input modality that can be operated by the user. The input and output modalities can be very simple e.g., they can consist of a button and LEDs. The users would press the button multiple times. On each press, the LEDs on both devices display a color and the user compares the colors and that they are synchronous. A noticeable delay or color difference signifies a security threat.

System and method for human assisted secure information exchange

The present invention relates to a method to make effective use of non rectangular display space for displaying a collage. In an embodiment of the invention, a heterogeneous set of images can be arranged to display the region of interest of the images to avoid overlapping regions of interest. The background gaps between the regions of interest can be filled by extending the regions of interest using a Voronoi technique. This produces a stained glass effect for the collage. In an embodiment of the present invention, the technique can be applied to irregular shapes including circular shapes with a hole in the middle. In an embodiment of the present invention, the technique can be used to print labels for disks.

Annealing algorithm for non-rectangular shaped stained glass collages

Embodiments of the present invention introduce a novel recursive assembly process to automatically create a library of components. It starts with simple components used as building blocks and proceeds by repeatedly combining these randomly into more complex ones. The utility and quality of these random combinations of components are measured against a set of functional goals. Useful combinations then become new components in the library that can be used as building blocks for further random combination. This description is not intended to be a complete description of, or limit the scope of, the invention. Other features, aspects, and objects of the invention can be obtained from a review of the specification, the figures, and the claims.

System and method for automatic design of components in libraries

The present invention relates to techniques for supporting organizational, labeling and retrieval tasks on an electronic tabletop, wall or large display. In various embodiments of the invention, a dynamic visualization is used to show a current working set of documents. In an embodiment of the invention, the rest of the collection is represented in the background as small dots. In an embodiment of the invention, when a user moves objects into groups or creates a label, relevant objects in the background are automatically retrieved and moved into the foreground. In an embodiment of the invention, retrieved objects along with relevant objects in the current set are highlighted and decorated with arrows pointing to their relevant groups. In an embodiment of the invention, the movement is animated to provide user feedback when objects must travel long distances on a large display.

Interactive techniques for organizing and retrieving thumbnails and notes on large displays

A 3D graphical user interface includes a two-dimensional ground-plane layout representing the relationship between one or more leaf elements of a tree data structure. The interface further includes at least one building-like structure, each of the at least one building-like structure corresponding to a respective one of the one or more leaf elements. Each of the at least one building-like structure provides a summary of media associated with the respective one of the more leaf elements corresponding to at least one building-like structure.

Systems and methods for creating an interactive 3D visualization of indexed media

A provably correct computer program can be generated using genetic programming techniques. A desired behavior is used to define a formal specification. An initial population of programs is created where each program has a meaning that can be defined using a formalization technique. A fitness function is applied to measure a distance between the meaning of a program, i.e., its actual behavior, and the specification. Any program having a zero value as the measure of distance between the meaning of the program and the specification is determined to be provably correct. After the fitness of some or all of the programs in the current generation of programs has been computed, a provably correct program has not yet been found in the current generation, mutation and/or crossover techniques are performed on at least some of the fittest individuals in the current generation to create the programs of a next generation.

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Sunnyvale, CA, United States of America

Wolfgang Polak