Carl-zeiss-smt Ag

Wolfgang Otto

Guenther Seitz

The method serves for the interferometric measurement of non-rotationally symmetric wavefront errors on a specimen . The specimen is brought into a number of rotational positions, at least one measurement result being determined in each of the rotational positions and a mathematical evaluation of all measurement results is performed. The measurement results (M. . . M; N. . . N) of each of the measurement series (M, N) are determined respectively in mutually equidistant rotational positions of the specimen . The measurement results (M. . . M, N. . . N) of each of the at least two measurement series (M, N) are evaluated independently of one another for non-rotationally symmetric wavefront errors (&#x3c;W&#x3e;, &#x3c;W&#x3e;) on the specimen, and a difference is computationally rotated m or n times and the results averaged out. At least one of the wavefront errors (&#x3c;W&#x3e;, &#x3c;W&#x3e;) is corrected with the result (&#x3c;&#x3c;W&#x3e;-&#x3c;W&#x3e;&#x3e;or &#x3c;&#x3c;W&#x3e;-&#x3c;W&#x3e;&#x3e;) averaged in this way.

Method for the interferometric measurement of non-rotationally symmetric wavefront errors

The method is used for the interferometric measurement, in particular for the interferometric absolute measurement, of non-rotationally symmetric wavefront errors on a specimen. The specimen can in this case be brought into a plurality of rotational positions, at least one measurement result being determined in each of the rotational positions. A mathematical evaluation of all measurement results is carried out in conclusion. The measurement is carried out in at least two measurement series (M, N). The measurement results (M. . . M, N. . . N) of each of the measurement series (M, N) are respectively determined in mutually equidistant rotational positions of the specimen. Each of the measurement series (M, N) comprises a specific number m, n of measurements. The individual numbers m, n are natural and mutually coprime numbers.

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Aalen, Germany

Wolfgang Otto