Carl-zeiss-stiftung

Schott Glas

Wolfgang M&ouml;hl

Burkhard Danielzik

Marten Walther

Manfred Lohmeyer

Martin Heming

Lars Bewig

Stefan Bauer

Hartmut Bauch

Roland Hochhaus

Markus Kuhr

Nina Freitag

Thomas K{umlaut Over (u)}pper

There are now provided thin-film solar cells and method of making. The devices comprise a low-cost, low thermal stability substrate with a semiconductor body deposited thereon by a deposition gas. The deposited body is treated with a conversion gas to provide a microcrystalline silicon body. The deposition gas and the conversion gas are subjected to a pulsed electromagnetic radiation to effectuate deposition and conversion.

Thin-film solar cells and method of making

The invention concerns a plasma CVD system (in particular a plasma pulse CVD system) with an array of microwave antennas. According to the invention, in order to improve the homogeneity of the layer, interference is prevented by controlling adjacent antennas in a chronologically offset manner. To that end, microcapsules are provided within the macrocapsules of the plasma pulse CVD process. Additionally, the uniformity of the layer deposition at the interfaces between adjacent modules can be optimized by radio-frequency excitation by means of suitable electrodes, magnetic fields or the configuration of the gas inlets. The surface coated in an operating cycle can thus be scaled as required.

Plasma CVD system with an array of microwave plasma electrodes and plasma CVD process

Growing community of inventors

Worms, Germany

Wolfgang Möhl

Growing community of inventors

Worms, Germany

Wolfgang M&ouml;hl

Wolfgang Möhl