Dr. Johannes Heidenhain Gmbh

Johannes Heidenhain Gmbh

Dr. Johannas Heidenhain Gmbh

Johannas Heidenham Gmbh

Dr. Johanns Hudenheim Gmbh

Wolfgang Holzapfel

Walter Huber

Markus Meissner

Elmar Josef Mayer

Ralph Joerger

Michael Hermann

Joerg Drescher

Bernhard Musch

Thomas Kaelberer

Jörg Drescher

Ulrich Benner

Sebastian Tondorf

Karsten Saendig

Peter Speckbacher

Johannes Trautner

Karsten Sändig

Mathias Hausschmid

Volker Seyfried

Johann Mitterreiter

Erwin Spanner

Christoph Lingk

Andreas Franz

Jan Braasch

Johann Streitwieser

Herbert Huber-Lenk

Herbert Reiter

Siegfried Reichhuber

Robert Bernhard

Volker H&ouml;fer

Dieter Michel

Josef Weidmann

Michael Stepputat

Heinz-G&uuml;nther Franz

Herbert Pronold

Udo Linnemann

Daniel Frese

Alois Huber

Florian Garczarek

Alfons Spies

Martin Heumann

Reiner Burgschat

Hermann Hofbauer

Rainer Hagl

Wolfgang Pucher

Volker Hoefer

Andreas Schmidt

Wolfgang Brode

Heinz Tovar

Peter Pechak

Martin Seichter

Kilian Bauer

Markus Kühler

Robert Kraus

Herbert Mauerberger

Robert Sturm

Johannes Schneider

Andreas Schreiber

Gabriele Ehgartner

Marco Schade

Gerhard Vogt

Josef H&ouml;hentinger

Franz Obermaier

G&uuml;nter Schwarzrock

Markus Meißner

Robert Kellner

Ullrich Benner

Volker Hofer

Hans R Kober

Robert Metzke

Michael Kugler

Gerhard Bock

Florian Flossmann

Kai Rascher

Stefan Weis

Manuel Scherer

Jürgen Schoser

Klaus Loeschcke

Völker Hofer

Bernhard Pletschacher

Ralf Bihr

Thomas Kälberer

Juergen Schoser

Alexander Gruber

Jürgen Thiel

Katie Dodds-Eden

Martin Roetzer

Marc Oliver Tiemann

Manuuel Scherer

Stefan Birnbacher

Markus Eberl

Volker HÖFER

Thomas Huber

In an optical position-measuring device for acquiring the rotational angle between two objects that are rotationally moveable relative to each other, a grating measuring standard rotating about an axis of rotation is arranged as a reflection grating. Position information both about an azimuthal rotary movement about the axis of rotation and about a radial displacement of the grating measuring standard is able to be obtained. At least one detection unit is used for scanning the rotating grating measuring standard in order to determine the azimuthal rotational angle as well as a radial displacement of the grating measuring standard. The neutral pivot points of the scanning of the grating measuring standard for the determination of the rotational angle and the displacement are situated in the same plane, with this plane being situated in parallel with the grating measuring standard. The neutral pivot point denotes the particular location about which the grating measuring standard or the detection unit is able to be tilted without a position offset.

Optical position-measuring device

A sensor element for storing rotation or position information includes a substrate and a domain wall conductor arranged on the substrate. A course of the domain wall conductor is of a closed circumferential, continuous configuration without crossings. The domain wall conductor comprises a first region having a positive curvature and a second region having a negative curvature.

Sensor element for storing rotation or position information

An optical position measuring device for recording a relative position of two scales includes the scales. The longitudinal extents of the scales are oriented parallel to a first and second measuring direction. A horizontal plane of movement is spanned by these measuring directions. A light source is configured to emit an illumination beam that is split into at least two sub-beam bundles at the first scale. The sub-beam bundles subsequently impinge on the second scale, which is tilted about the direction of the longitudinal extent thereof relative to the horizontal plane of movement, and are back-reflected to impinge again on the first scale and are recombined there such that a resulting signal beam is subsequently propagated toward a detection unit, via which phase-shifted scanning signals are generatable with respect to a relative movement of the scales along a third perpendicular measuring direction and the first or second measuring direction.

Optical position measuring device

A device includes a grating coupler with a grating constant, two light sources, and a planar waveguide, which are configured to couple light with two different wavelengths &#x3bb;, &#x3bb;into the waveguide. The waveguide has a waveguiding layer disposed adjacent to a substrate layer and a cover layer. The waveguiding layer has a thickness d and effective refractive indices of N(&#x3bb;, j), wherein &#x3bb;is one of the wavelengths and jis an order of a waveguide mode, wherein the coupled light of the wavelength &#x3bb;has a coupling angle &#x3b1;into the waveguide, and wherein an amount of difference between the coupling angles is a divergence angle &#x394;&#x3b1;. Guiding of waveguide modes of the order j&#x3e;0 is possible for a wavelength of the coupled light. The waveguiding layer is arranged to couple the light via the grating coupler under a divergence angle of &#x394;&#x3b1;&#x3c;6.

Device and method for coupling light of different wavelengths into a waveguide

A measuring device includes a movable probe head and an optical position sensing device for determining the spatial position and orientation of the probe head relative to a reference point. The position sensing device includes at least three position determination modules, arranged as a transmission unit or as a receiving unit, at least one position determination module being situated on the probe head, and at least one position determination module being situated at the reference point. A transmission unit has transmission unit marking element(s). A receiving unit includes optoelectronic detector(s) and receiving unit marking element(s), positioned in a defined spatial relationship relative to the optoelectronic detector. Visual contacts exist between at least some of the position determination modules. The position determination module on the probe head and the position determination module at the reference point are connected by at least one uninterrupted chain of visual contacts.

Measuring device

A position-measuring device for determining an absolute position includes a measuring scale and a scanning unit that is movable relative to the measuring scale along at least one measuring direction. To generate a scannable signal pattern, the measuring scale has a measuring graduation which includes a raster of stripe elements arranged along the measuring direction at a measuring-scale longitudinal period. For the encoding of an absolute position, the stripe elements have a periodic structure having a measuring-scale transverse period along a transverse direction that is oriented perpendicular to the measuring direction. For scanning the signal pattern, the scanning unit has a two-dimensional detector system having a plurality of detector elements, which includes multiple detector columns having a plurality of detector elements in each case. The detector columns are periodically arranged along the measuring direction and the detector elements are periodically arranged along the transverse direction, so that by scanning the signal pattern, at least three periodic partial incremental signals are able to be generated with regard to relative movements along the measuring direction, as well as at least one absolute-position signal per detector column.

Position measuring device

An interferometric distance measurement device includes a multiple wavelength light source, supplying a light beam having at least three different wavelengths. An interferometer unit is provided, which splits the light beam into a measuring light beam and a reference light beam. The measuring and reference light beams reflected back by measuring and reference reflectors are superimposed in an interfering manner to form an interference light beam. The interference light beam is split via a detection unit such that, in each instance, a plurality of phase-shifted, partial interference signals result per wavelength. With the aid of a signal processing unit, an absolute position information item regarding the measuring reflector is determined from the partial interference signals of different wavelengths.

Device for interferometric distance measurement

In a position-measuring device for determining the position of a first object with respect to a second object that is displaceable relative to the first object, a measuring standard is connected to the first object and includes at least one periodic scale grating, which is arranged as a transmission grating and has a first periodicity. A scanning unit is connected to the second object and includes at least one light source, at least one periodic scanning grating, which has a second periodicity, and a detector system, which includes detector regions that are sensitive to radiation and are periodically disposed at a third periodicity in a detection plane. The bundles of rays emitted by the light source first impinge upon the scale grating and then pass through the scanning grating. The interaction of the bundles of beams with the scale grating and the scanning grating produces a periodic fringe pattern having the third periodicity in the detection plane which, when scanned with the aid of the detector system, makes it possible to generate a plurality of incremental signals that are phase-shifted relative to one another. The scanning grating is arranged between at least one first and one second transparent, plate-shaped carrier element, and the space between the scanning grating and the detector regions is completely filled with a material that has a refractive index of n&#x3e;1.3. The clearance between the scale grating and the adjacent boundary surface of the first carrier element is in the range of 10 &#x3bc;m to 200 &#x3bc;m.

Position-measuring device

An optical position-measuring device for sensing a position of two relatively movable objects includes a scale connected to one object and having a measuring graduation. A scanning unit is disposed on the other object and has optical elements. An arrangement and design of the optical elements of the scanning unit results in a scanning beam path in which split and subsequently interfered sub-beams propagate mirror-symmetrically with respect to a plane of symmetry and either impinge on and/or are reflected back from the scale in a V-shape. The plane of symmetry is tilted by a defined tilt angle relative to the scale about an axis of rotation that is oriented parallel to a surface of the scale and extends perpendicular to the graduation direction. The sub-beams that are interfered are deflected at the measuring graduation into symmetric diffraction orders. The sub-beams travel identical optical path lengths between splitting and recombination.

An optical position-measuring device for determining the position of a first object relative to a second object movable relative to the first object along a measurement direction includes a scale with a measuring graduation connected to the first object and extending along the measurement direction. A scanner is connected to the second object and includes a fiber-optic array including optical fibers. The fiber-optic array is configured as a fiber-optic plate having an image-input face facing the scale and an image-output face facing the detector array. The fiber-optic array transmits a light pattern into a detection plane of the detector array. An interstitial medium is disposed between the image-output face of the fiber-optic plate and the detector array to ensure that an amount of deflection that the beams exiting the image-output face undergo on a path to the detector array is smaller than in a case without the interstitial medium.

In a device for measuring the vibrational amplitude of a capillary tube of a wire bonder, the capillary tube is placed between a light source and a detector system, so that the vibrational amplitude is able to be ascertained from the shading of a beam of light by the capillary tube. The beam of light emitted by the light source is split into a measuring beam of light and a reference beam of light, an edge of the capillary tube at least partially shading the measuring beam of light in the vibrating state, while the reference beam of light is not shaded. The detector system includes a measuring detector assigned to the measuring beam of light as well as at least one reference detector assigned to the reference beam of light, and the vibrational amplitude of the capillary tube is ascertainable from the interconnected output signals of the measuring detector and the reference detector.

Device for measuring the vibrational amplitude of a capillary tube of a wire bonder

An X-Y table with a position-measuring device includes a table which is disposed on a support and is movable on the support so that altogether the table is positionable in a plane parallel to an underlying stationary base. Two groups of scanning heads are disposed on the support. For position measurement in two directions, a respective one of the scanning heads directs light through a respective transmissive scale attached along an edge of the table such that a respective reflective scale, which is stationary relative to a processing tool disposed above the table, reflects the light through the respective transmissive scale back to the respective scanning head. In a central position of the table, the two groups are in positional correspondence with the transmissive scales, and, in either of two edge positions of the table, only one of the two groups is in positional correspondence with the transmissive scales.

X-Y table with a position-measuring device

A position-measuring system includes a plurality of scanning units for the optical scanning of at least one measuring standard, the scanning units being coupled optically to a plurality of light sources and a plurality of detectors. Disposed between the scanning units and the detectors are a plurality of demultiplexers, via which in each case at least two scanning units are coupled to one detector.

Position-measuring system, having scanning units multiplexed to light sources and detectors, for optically scanning a measuring standard and method for operating such a position-measuring system

An optical position-measuring device for absolute position determination includes a material measure extending along a measurement direction and including an incremental graduation and an absolute code. A scanning unit movable relative to the material measure has a light source, a scanning grating for optically scanning the incremental graduation and a detector device. The detector device includes an incremental detector for generating incremental signals from the optical scanning of the incremental graduation and an absolute detector for generating absolute signals from optical scanning of the absolute code. A common detection plane is located at a defined perpendicular distance from the scanning grating and/or a periodicity of a fringe pattern on the incremental detector is selected such that, in the event of scattering contamination in a region of the material measure and/or the scanning grating, amplitudes of the incremental signals and the absolute signals drop off equally.

Optical position-measuring device having incremental detector and absolute detector disposed in a common detection plane at a defined perpendicular distance from a scanning grating

A device for position determination includes a light source and a planar measurement reflector movable along a measurement direction oriented perpendicular to the measurement reflector. A detector device is disposed such that a beam emitted by the light source strikes the detector device after impinging on the measurement reflector so that, in an event of a movement of the measurement reflector along the measurement direction, a signal results which is dependent on a position of the measurement reflector and from which a reference signal is generatable at a defined reference position. A deflection unit is disposed so as to deflect the beam such that the beam strikes the measurement reflector twice and therebetween passes through the deflection unit. The deflection unit is arranged so that a deviation in beam direction, resulting after the first reflection from a tilt of the measurement reflector, is compensated after the second reflection.

Device for position determination

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Obing, Germany

Wolfgang Holzapfel