Leybold Gmbh

Oerlikon Leybold Vacuum Gmbh

Leybold Vacuum Gmbh

Oerlikon Leybold Vaccum Gmbh

Wolfgang Giebmanns

Thomas Dreifert

Roland Müller

Dirk Schiller

Robert Jenkins

Hartmut Kriehn

Peter Birch

Hans-Rochus Gross

Hannes Kamecke

Magnus Janicki

A screw vacuum pump comprises a housing forming a pumping chamber, wherein the housing is made of aluminum or an aluminum alloy. Further provided are two screw rotors arranged in the pumping chamber, each screw rotor comprising at least one displacer element having a helical recess for forming a plurality of windings, wherein the at least one displacer element is made of aluminum or an aluminum alloy. Between the region in which prevail 5% to 30% of the outlet pressure and a pressure-side end of the rotor (pump outlet), at least six, particularly at least eight, and with particular preference at least ten windings are provided.

Screw vacuum pump without internal cooling

A vacuum pump screw rotor, comprising at least two helical displacer elements on a rotor shaft. The at least two displacer elements have different pitches, but the pitches of each displacer element are constant. Furthermore, the displacer elements each have a helical recess, each having a contour that remains the same over its entire length. Hereby, a suction-side displacer element has a recess having an asymmetric contour, and a pressure-side displacer element has a recess having a symmetrical contour.

Vacuum pump screw rotors with symmetrical profiles on low pitch sections

A vacuum pump comprises pumping elements arranged in a pumping chamber. An electric motor drives the pumping element. A frequency inverter is provided for changing the rotational speed of the electric motor. The frequency inverter is arranged in a frequency inverter housing immediately connected to the pump housing. An air cooler and a liquid cooler are arranged in the frequency inverter housing to cool the frequency inverter.

Vacuum pump

A vacuum pump, in particular a pump of the type with rolling bodies, includes rotary bodies () arranged in a suction chamber (). The pressure side () of the pump is connected to the suction side () by a connecting channel (). In the connecting channel (), a valve () is arranged which closes a through opening (). On exceeding a set pressure difference between the pressure side () and the suction side (), the valve opens automatically. In order to reduce the necessary space and to reduce the switching noise from the valve, the valve body is embodied as a valve flap ().

Vacuum pump in particular roots type pump

A screw vacuum pump, in particular for compression against atmospheric pressure, comprises a pump housing defining a suction chamber. Two meshing screw rotors are arranged in the suction chamber. Further, an overpressure outlet provided, which comprises an overpressure opening in a side wall of the suction chamber. Further, an overpressure valve is arranged in the overpressure outlet. The width (b) of the overpressure opening in the longitudinal direction of the screw rotors is smaller than or equal to a tooth width (B) of the screw rotors.

Screw-type vacuum pump having overpressure openings

A vacuum pump () comprises at least one rotor shaft () having a rotor section () with a rotor (), a bearing section () with a bearing (), and a shaft sealing system () that is axially situated between the rotor section () and the bearing section (). The shaft sealing system () axially comprises, on the side of the rotor, a gas seal () and, on the side of the bearing, an oil seal (). The shaft sealing system () additionally comprises, between the gas seal () and the oil seal (), a separating chamber, which surrounds the rotor shaft () and is ventilated by at least one separating chamber ventilation duct (). This enables the pressure difference that decreases via the gas seal and the pressure difference that decreases via the oil seal to be adjusted. An appropriate adjustment can prevent oil on the bearing side from passing through the oil seal toward the separating chamber.

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Erftstadt, Germany

Wolfgang Giebmanns