International Business Machines Corporation

Wolfgang F Mueller

John R Kranik

Gordon Taylor Davis

Alfred A Stricker

Charles M McKenna

George E Melvin

Lawrence P Remsen

George B Vandergheynst

Franz Andrusch

Siegfried Beerhalter

George Popp

Felix B Zykoff

Erich H Bayer

A single stroke punch apparatus includes positive removal by compressed air of workpiece slugs which adhere to the punch. A die plate has a series of bushing receiving features formed from two concentric diameters. The die plate has provision for introducing a flow of compressed air into each of the bushing receiving features. A support bushing is mounted in each of the bushing receiving features and has a surface for support of the workpiece which is elevated with respect to the die plate. A slug removal bushing is also mounted in the bushing receiving feature and is pressed into the wall of the support bushing opposite the workpiece supporting surface to form a seal. The wall of the bushing receiving feature, the support bushing, and the slug removal bushing define a passage for the compressed air such that the compressed air impinges upon the punch directly adjacent the end wall of the support bushing to positively remove the punch slug which is adhered to the punch. The slug removal bushing has a passage for disposal of the punch slugs to which a vacuum may be applied to enhance slug disposal.

Punch apparatus with positive slug removal

A punching mechanism includes a permanent magnet and a pole-piece connected to one pole of the permanent magnet and spaced from the other pole by a gap. A movable coil is disposed at least partially within the gap. A punch actuator is connected to the movable coil, and conductors are provided for conducting an electrical current to the coil. Current is supplied to the coil to effect a punching action.

Punching mechanism

A welding apparatus for bonding small wires to a metal surface wherein an electric current is passed through a portion of a wire in contact with a welding tip, the apparatus having a welding tip support means for supporting the welding tip for rectilinear movement, the support means having movable mass less than 10 grams, the low mass enabling the welding tip to maintain contact with the wire portion during the molten phase of the wire during the welding operation, and a means to urge the tip support means into engagement with the wire.

Microweld apparatus with an improved electrode tip design and tip support

An improved interposer punch apparatus including a plurality of elongated punch elements, a head slidably supporting the punch elements, means to urge the punch elements in an extended position, a stripper plate, and a base for supporting a substrate to be punched with apertures for receiving the lower ends of the punch elements, the imrovement being a means in said base for forcibly displacing slugs of material punched from a substrate from the ends of the punch elements following a punching operation.

Punch apparatus

A horizontally movable slide bears a two section, continuously extending horizontally inclined, steep and shallow sloped cam slot controlling the vertical rise and fall of a cam follower driven support fixture for supporting a ceramic green sheet in underlying contact with a stencil mask in an automatic MLC screening machine. An apertured positioning flag moves horizontally with the slide and past a vertical height digital position encoder assembly and a mask separate encoder assembly. The positioning encoder assembly provides an electrical signal for controlling an actuator mechanism causing slide movement, indicative of the desired final positioning height of the green sheet relative to the mask when the fixture is moving towards the mask. When the actuator mechanism drives the slide in the opposite direction, to lower the green sheet from the mask, the mask separate encoder assembly produces a signal, in response to common positioning flag movement in the opposite direction with the slide to effect a change in speed of the actuator mechanism. This provides slow initial separation of the green sheet from the mask and final removal of the fixture from screening height, at a much more rapid rate.

Green sheet support fixture speed and position control system for a

A rotating target ion bombard or implant apparatus with an arrangement for cooling the target. The cooling arrangement utilizes a pattern of air openings or passages and air fins. The pattern of air openings are positioned concentric to the disc hub and act to separate the hub region of the disc from the outer target or work region. The air openings function to both reduce the conductive cross-section between the hub region and outer work region of the disc and permit air to pass from the implant or bombard side to the back surface thereof. The air fins are provided on the back surface of the disc to draw air through the openings when rotating. Cooling is achieved by rotating in atmosphere during the load/unload cycle of operation. Reduction of the conductive cross-section between work region and hub region reduces heat transfer to the ferrofluidic feedthrough means coupled to the hub region thereby increasing the ferrofluidic feedthrough means lifetime.

Cooled target disc for high current ion implantation method and apparatus

In an ion beam apparatus a structure for controlling the surface potential of the target comprising an electron source adjacent to the beam for providing electrons to the beam and means between the target and source for inhibiting rectilinear radiations, i.e., electron and other particle and photon radiations between said source and said target. This prevents heating of the target by the electron source and cross-contamination between the source and the target. The apparatus further includes means for maintaining said shield means at a lower temperature than said target. A further structure is provided for the measurement of the ion beam current while controlling said surface potential of the target which includes: walls adjacent to and electrically insulated from the target and surrounding the beam whereby the walls and target provide a Faraday Cage, means for introducing variable quantities of electrons into the beam within the Faraday Cage, means for measuring the target current, means for combining and measuring the target and wall currents to provide said ion beam current measurement and means for varying the quantities of introduced electrons to control the target current and thereby the target surface potential. Likewise, this apparatus further includes means for maintaining said shielding means at a temperature lower than said target.

Ion implantation apparatus with a cooled structure controlling the

A chuck for a workpiece, rotatable in spaced relation to and about an axis of rotation, and having a clamp jaw radially movable under centrifugal force to engage the workpiece against fixed mating clamp members. The structure can also have optional means enabling the chuck to tilt, with the workpiece, from a home position to a preselected angle under the rotation thereof about a pivot axis perpendicular to and spaced from the axis of rotation with return of the chuck to the home position under gravitational force when rotation thereof is stopped.

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Wappingers Falls, NY, United States of America

Wolfgang F Mueller