Kernforschungszentrum Karlsruhe Gmbh

Kernforschungszentrum Karlsruhe Gesellschaft MIT Beschrankter Haftung

Burkert Gmbh Werk Ingelfingen

Dragerwerk Aktiengesellschaft

Kernforschungszentrum Kalrsruhe Gmbh

Wolfgang Ehrfeld

Erwin W Becker

Dietrich Munchmeyer

Peter Hagmann

Gunther Krieg

Dirk Schmidt

Wilhelm Bier

Peter Bley

Erwin-Willy Becker

Asim Maner

Bernd Kowanz

Werner Schelb

Ursula Ehrfeld

Herbert Kiesele

Frank S Becker

Jurgen Mohr

Jurgen Tewes

Wolfgang Fritz

Herbert Moser

Harald Steinhaus

Ulrich Knapp

Hans Betz

Anton Heuberger

Friedrich Gotz

Method of producing microsensors with integrated signal processing

The invention is directed to an electrochemical measuring cell for detecting gaseous components with an electrolyte which is disposed between a counter electrode and a measuring electrode provided with gas permeable pores. The pores are configured as channels partially or completely filled with the electrolyte and these channels have a diameter which does not exceed 10 micrometers with a channel length of up to 300 micrometers and a web thickness of not more than 5 micrometers. With this configuration, drift and memory effects are suppressed and the measuring sensitivity is increased and, on the other hand, the response time and the residual current are reduced. When the measuring cell is used as a dosimeter, the counter electrode and the measuring electrode are decoupled with respect to a mass transport in the electrolyte.

Electrochemical measuring cell

The plate-like valve elements (10 and 20) of the microvalve are provided with a plurality of valve seats and, respectively, corresponding valve members. The sealing surfaces of a secondary valve element (10) are respectively formed by molding to copy the sealing faces of a primary valve element (20) so that the sealing surfaces of both valve elements are completely complementary to each other. The sealing surfaces need no further processing such as machining. Despite liberal tolerances of manufacture a high precision register of the valve elements in relation to each other is ensured.

Method of manufacturing microvalves

A valve plate (14) provided with slot-like valve ports (16) is able to slide between two stationary valve plates (10 and 12) which are joined with each other and are provided with corresponding slot-like valve ports (16). A electrostatic drive is integrated in the valve plates (10, 12 and 14). It consists of strip-like electrodes (20 and 22) which are arranged opposite to corresponding electrodes of another valve plate. By the application of suitable actuating potentials with the same or opposite polarity to the electrodes of different valve plates the actuating forces may be produced, which are needed for moving the movable valve plate (14).

Microvalve

A micro secondary electron multiplier or an array thereof employs discrete dynodes which are microstructured and applied to an insulating substrate plate. The substrate plate is provided with electrical conductor paths for the connection of the dynodes. The dynodes can be made using a technique such as X-ray depth lithography-galvanoplasty (the LIGA technique). The micro secondary electron multiplier or an array of such multipliers is extremely small and sensitive, and has a high time resolution. Furthermore there is considerable flexibility in positioning the multipliers of an array.

Micro secondary electron multiplier

A process for producing a filter including a microporous membrane and a supporting structure connected thereto, including producing a mold for the membrane and the supporting structure, filling the mold with a molding material whose solubility can be changed by high energy radiation, and forming the micropores by partial irradiation of the membrane with high energy radiation and removal of the regions having increased solubility. The filter produced according to the above method is a unitary structure with the supporting structure integrally connected to the membrane.

Microporous membrane filter and method of producing same

A cross flow microfilter comprises a filter housing having a flow chamber wherein a fluid is introduced on one side and a concentrate is removed on the opposite side a collection chamber from which a filtrate is removed, and at least one microporous membrane over whose one surface the fluid to be filtered flows in a parallel stream and whose other surface is oriented toward the collection chamber, the membrane having pores of a width between about 0.1 micron and 30 micron, the improvement wherein the pores of the membrane have slit-shaped cross-sections and given profiles, and are formed by a plurality of webs arranged in rows with predetermined spacing and by terminating plates which cover the webs, and the webs are applied onto one of the two plates by X-ray lithographic means, X-ray depth lithographic-galvanoplastic means, or molding and galvanoplastic means.

Cross flow microfilter

A method of producing a passive optical device having optical components including at least one reflection grating, at least one port for polychromatic light and a plurality of ports for monochromatic light. The method includes producing the optical components of the device utilizing X-ray depth lithography so that the grating lines of the reflection grating are parallel to the direction of X-ray radiation emitted as part of the X-ray depth lithography.

Method of producing a passive optical device including at least one

A method of producing a plate-shaped bearing member for sliding bearings, the structure being composed of a patterned body of supporting bearing material and a lubricant, utilizing a galvanoplastic fabrication step, the method including: producing a mold provided with a pattern of recesses, the step of producing including performing an X-ray deep-etch lithography procedure; filling the recesses to form the body of bearing material; removing the mold from the body of bearing material so that spaces are left in the bearing material; and filling the thus produced spaces with the lubricant.

Method of producing a sheet or plate-shaped structure as the bearing

A spinning nozzle plate having nozzle capillaries is produced by depositing a layer 11 of a material whose characteristics can be changed by high-energy radiation (resist material) on a galvanic electrode 12. After resist layer 11 is irradiated in a predetermined pattern and after resist material is selectively removed by a treatment which utilizes the different material characteristics resulting from the irradiation, columns of resist material remain on galvanic electrode 12 to serve as negatives 21 of the nozzle capillaries. A galvanic layer 31 which encloses the negatives 21 of the nozzle capillaries is then produced on the galvanic electrode 12. Then the galvanic layer 31 is levelled and the negatives 21 are removed, as is the galvanic electrode 12. The process is particularly useful for producing spinning nozzle plates having nozzle capillaries with profiles of a special shape, essentially if the cross-sectional dimensions of the nozzle capillaries are small.

Method for producing a spinning nozzle plate

Method for producing a plurality of deformable connecting elements for electrically joining microelectronic components. The method includes irradiating with high energy radiation portions of a plate-like member composed of material having a material characteristic which is changed by such high energy radiation, each portion having dimensions corresponding to those of a connecting element; utilizing the changed material characteristic of the material of the irradiated portions to remove such material from the irradiated portions to produce a plate-like mold containing a plurality of mold structures each defining a shape corresponding to a connecting element at a given location of said member, each such mold structure having lateral dimensions and a height dimension which is a multiple of the smallest lateral dimension; filling the mold structures with metal by electroplating the metal into such mold structures to produce metallic connecting elements; fixing the connecting elements to a microelectronic component; and removing the plate-like mold.

Method for producing connecting elements for electrically joining

A method for producing a mask for deep-etch x-ray lithography in which the mask pattern of a thin-film mask having thin absorber structures is transferred by recopying with soft X-ray radiation to an X-ray resist layer whose layer thickness corresponds to the thickness of the absorber structures of the mask to be subsequently produced. Transfer errors during recopying are avoided by producing the thin-film mask directly on one side of a carrier membrane; applying a positive X-ray resist layer on the other side of the carrier membrane; irradiating the positive X-ray resist layer with approximately parallel X-ray radiation through the thin-film mask to produce irradiated portions in the positive X-ray resist layer; removing the irradiated portions of the positive X-ray resist layer to expose portions of the carrier membrane; electrolytically depositing elements having a high atomic number, e.g., heavy metals, onto the exposed portions of the carrier membrane, removing the remaining resist material and etching away the thin-film mask.

Method for producing deep-etch, X-ray lithography masks

The present invention relates to a method for producing spinning nozzle plates having funnel-shaped preliminary channels in flow communication with nozzle capillaries. Two embodiments of the method are provided which use photolithographic and electrodeposition techniques. Common to both embodiments of the method is the use of a metal plate provided with funnel-shaped preliminary channels as a self-aligning irradiation mask for irradiating a photoresist layer provided on the metal plate. Nozzle capillaries subsequently defined either in an electrodeposited layer according to a first embodiment of the invention or in electrodeposited tubular projections according to a second embodiment of the invention, have an offset-free, continuous transition between themselves and the preliminary channels. Photolithographic and electrodeposition techniques may also be used to define the funnel-shaped preliminary channels in the metal plates.

A method for producing spinning nozzle plates having spinning nozzle channels employs a mold plate which contains mold channels corresponding to the spinning nozzle channels. The mold plate is initially connected with a galvanic electrode containing feed channels which communicate with the mold channels. Then negatives of the spinning nozzle channels are produced by filling the mold channels and the feed channels with an electrically insulating molding material and thereafter removing the mold plate, so that columns of molding material remain connected to the galvanic electrode. Finally, a galvanic layer enclosing the negatives of the spinning nozzle channels is produced, the galvanic layer is leveled, and the negatives as well as the remaining mold material are removed. The mold plate itself may be produced by depositing a layer of resist material on a further galvanic electrode, irradiating the resist layer in a predetermined pattern using high energy radiation, selectively removing portions of the irradiated resist layer to produce negatives that are connected to the further galvanic electrode, depositing a further galvanic layer, and removing the negatives. These techniques permit economical production of spinning nozzle plates, particularly plates having nozzle capillaries with specially shaped cross sections and small critical dimensions.

Method for producing spinning nozzle plates

In order to produce a plurality of plate shaped metal bodies containing a microstructure from a single molding tool constituting a master for the bodies, a negative mold is formed by filling the recesses in the microstructure of the tool with electrically insulating material and fastening to the insulating material an electrically conductive material which contacts the end faces of the microstructure of the tool.

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Karlsruhe, Germany

Wolfgang Ehrfeld