Pfeiffer Vacuum Gmbh

Wolfgang Eberl

Armin Conrad

Heinrich Lotz

Armin Blecker

Helmut Bernhardt

Jörg Stanzel

Christopher Mark Rippl

Michael Willig

Heinz Reichhart

Anneliese Reichhart

A vacuum pump including two gas friction pumps arranged parallel to each other and having each at least one stage having an inlet communicating with a common suction region and an outlet communicating with a separate discharge region, a multi-stage pump arranged downstream of the two gas friction pumps, connection conduits for communicating the separate discharge regions with a common discharge chamber, and a conduit for communicating the common discharge chamber with the suction chamber of the downstream pump.

Gas friction pump

A vacuum pump, including a housing having inlet and outlet; a shaft arranged in the housing and supported bearing provided in the housing, drive for rotating the shaft; and a plurality of pumping units arranged in the housing and formed each of rotational and stationary gas delivery components with the rotational components being supported on the shaft and the stationary components being connected with the housing, at least one of the pumping units consisting of a plurality of connected parallel to each other and arranged one after another in an axial direction, molecular pumping stages with each pumping stage being formed based on Gaede principle; with the molecular pumping stages being connected with each other in common connection channels.

Vacuum pump

A vacuum pump including suction and discharge regions, two gas friction pumps arranged on opposite side of the suction region and parallel to each other and each having at least one stage and a discharge region channels connecting the discharge regions and providing for gas flow from the discharge regions into a common discharge region of the two gas friction pumps, and a multi-stage pump located downstream of both gas friction pumps for compressing the gas flowing through the multi-state pump and having a suction region and a discharge region connected with the discharge region of the vacuum pump, with gas flowing into the suction region from the common discharge region of the two gas friction pumps.

A vacuum pump including a housing having a suction flange and an outlet opening, a plurality of stationary and rotatable pump-active elements arranged in the housing, a rotor shaft for supporting the rotatable elements, a system of gas bearings for supporting the rotor shaft, with the gas bearings being substantially formed of stator elements with gas delivery conduits and gas outlets, and a system of resilient elements for connecting the stator elements with the bearing housing.

Growing community of inventors

Solms, Germany

Wolfgang Eberl