Singulus Technologies Ag

Wolfgang Becker

Edgar Rüth

Eggo Sichmann

Reinhard Gerigk

Michael Muecke

Reiner Rohrmann

Klaus Truckenmueller

Jochen Heilingbrunner

Marjan Filipovic

Edgar Rueth

Benedikt Klein

A method and a device for stringing together objects in transport systems, preferably in coating systems, for adjusting the distance between two objects, preferably substrates or substrate holders, being arranged one behind the other, wherein the front object moves at a process speed vin the transport system and the rear object is at an undefined distance from the front object. The method comprises the following steps: (a) accelerating the rear substrate to an initial speed v&#x3e;v; (b) detecting an increase in the driving torque when the rear substrate moves against the front substrate; (c) delaying the rear substrate by a predetermined value in order to establish a predetermined distance afrom the front substrate; and (d) adjusting the speed of the rear substrate to the process speed v.

Method and device for stringing substrates together in coating systems

The invention relates to a method and a device for aligning substrates () in an XY-plane. A polygonal, flat substrate (), the substrate plane of which is parallel to the XY-plane or lies in the XY-plane, is aligned with respect to reference coordinates and a reference angular position in the XY-plane. A corner () of the substrate () is detected using image detecting means (). In addition, the position coordinates of the substrate () are determined. Using evaluating means (), the angular position of the corner () of the substrate () in the XY-plane is determined, and the position differences between the reference coordinates and the position coordinates as well as the angle difference between the reference angular position and the angular position of the substrate corner () are calculated. The substrate () is moved and/or rotated in the XY-plane according to the determined position difference or the angle difference. By rotating the substrate () several times, each corner () and edge () of the substrate () can be detected using the image detecting means (). This enables an edge inspection during the substrate transport so that additional process steps such as laying the substrate () down and picking the substrate back up can be omitted.

Method and device for aligning substrates

An object () is identified based on the unique, characteristic, optical properties () before the object is processed in a facility (). In addition, a clear identification is assigned to the object (). All production data and process parameters for all facilities () through which the object () passes are stored together with the identification in an electronic data processing means (). After the object () has passed through a facility (), the object () can be identified again based on its unique, characteristic, optical properties (). Thus, it can be examined whether the system for tracking the object () within a production facility () functions without errors. Alternatively, the new identification can also be used to assign a new identification to an object () for which the unique, characteristic, optical properties () have changed during the production process.

Method and device for identifying objects and for tracking objects in a production process

The invention relates to a method and a device for regulating the thickness of coatings or layers, in particular of bond coatings, wherein bonding is controlled in a programmed manner thereby taking into account the influence of disturbance variables. The invention can be used especially in the production of DVDs. The advantages of the present invention are reproducible accuracy in adjusting the thickness of the coating/bond coating and thus an increased production output.

Method and device for controlling thickness during spin coating

A method of coating a substrate by magnetron cathode sputtering includes a sputtering cathode having pole shoes and being arranged in a vacuum chamber. A target and a magnetic field are provided in an area of the surface of the target and the magnetic field is varied stepwise and/or continuously to displace the plasma radially such that the erosion groove is likewise displaced radially. The variable magnetic field is generated by coils between the back surface of the target and a yoke plate while a static magnetic field is gernated by an annularly arranged magnet in the area of the yoke plate and a target space between the target and the substrate is shielded by means of an iron core which also increases the field strength of the variable magnetic field.

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Schaafheim, Germany

Wolfgang Becker