Siemens Aktiengesellschaft

Wolf Kleeberg

Johann Kammermaier

Rolf-Winfried Schulte

Starting from hydrocarbons and/or fluorocarbons, glow polymerisate layers can be generated on a substrate by means of a high-frequency low-pressure glow discharge. Chemically stable layers are obtained if the glow polymerisate is subjected, after the preparation and with the exclusion of air, to an annealing process in an atmosphere of hydrocarbon and/or fluorocarbon monomers at temperatures between 100.degree. and 450.degree. C. for 1 to 10 hours, or if the substrate is heated to temperatures between 100.degree. and 450.degree. C. during the preparation of the glow polymerisate.

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Erlangen, Germany

Wolf Kleeberg