Taiwan Semiconductor Manufacturing Comp. Ltd.

Wolf Hung

Yeh-Chieh Wang

Hong-Hsing Chou

Chung-Nan Chen

Jaw-Lih Shih

Chao-Li Shih

The present disclosure provides an interference filter, a lithography system incorporating an interference filter, and a method of fabricating an interference filter. The interference filter includes a transparent substrate having a front surface and a back surface, a plurality of alternating material layers formed over the front surface of the transparent substrate that form a bandpass filter, and an anti-reflective structure formed over the back surface of the transparent substrate. The alternating material layers alternate between a relatively high refractive index material and a relatively low refractive index material.

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Hsinchu, Taiwan

Wolf Hung