Taiwan Semiconductor Manufacturing Comp. Ltd.

Woei-Chyi Kuo

Mingchu King

Shih-Tsung Liang

A yield patrolling system, which monitors production yield of a manufacturing line, has at least one product measurement and test device. The product measurement and test device measures yield determining parameters of product at completion of process steps executed by equipment within the manufacturing line. The system further has a test database in communication with the product measurement and test device to receive and retain the measured yield determining parameters. A statistical calculator is in communication with the test database to receive the measured yield determining parameters. The statistical calculator then calculates from the measured yield determining parameters production yield statistics indicating an amount of the product being fabricated on the manufacturing line. A yield-warning device is in communication with the statistical calculator to receive the production yield statistics and to provide a yield warning alert to a responsible person indicating that the manufacturing line is not fabricating product with a sufficient yield. Further, a yield information interface receives a compilation of the production yield statistics for each process step from the statistical calculator.

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Taipei, Taiwan

Woei-Chyi Kuo