Horiba Stec, Co., Ltd.

Emerson Electric Company

Other

Horiba, Ltd.

Fugasity Corporation

William W White

Tadahiro Yasuda

Daniel Thomas Mudd

Virginia Miller

Joseph C Dille

Patrick Allen Lowery

Maximilian Martin Gundlach

John Thomas Dick

Gary P Campbell

Scott S Bump

Kimura Miyoshi

Christopher Davis

Edward Cocciadiferro

Michael Kramer

David E Grudzinski

Esteban Daniel Gonzalez

Andrew Wayne Price

Brian James Ebert

Nelson D Smith

Christopher B Davis

William H White

Era Benjamin Hartman

A flow restrictor is provided, comprising a first sheet including a flow passage, and a second sheet stacked on the first sheet. A hole is provided in a center of the second sheet. The flow passage includes a groove cut into a surface of the first sheet that communicates with an expansion zone at a peripheral area of the first sheet. A peripheral edge of the second sheet contacts the first sheet in the expansion zone between an inner diameter and an outer diameter of the expansion zone.

Flow restrictor for fluid flow device

A gas delivery system is provided comprising an electrical backplane, a system controller operatively coupled to the electrical backplane, and a plurality of mass flow controllers. Each mass flow controller includes respective mass flow control circuitry operatively coupled to the electrical backplane. The system controller and each mass flow control circuitry are physically mounted on the electrical backplane. The gas delivery system further comprises a pump/purge system to help eliminate pressure build up in the system and provide a quick stop to a flow process in the system. Accordingly, a row associated with a flow process may be evaluated so that a mass flow controller may be swapped out as needed.

Gas delivery system with electrical backplane

A flow rate ratio control device is provided with a main flow path, a plurality of branch flow paths that branch off from a terminus of the main flow path, a plurality of fluid control devices that are provided respectively on each branch flow path, and that are each equipped with a valve and a pressure-based flow rate sensor that is disposed downstream of the valve, and an operation setting unit that establishes settings such that, based on the target flow rate ratio, any one fluid control device from among the plurality of fluid control devices is made to operate in a flow velocity control mode in which the flow velocity of a fluid is controlled upstream of each valve, and the remaining fluid control devices are made to operate in a flow rate control mode in which the flow rate is controlled based on the target flow rates.

Flow rate ratio control device with flow velocity control mode

To provide a flow rate characteristic function identification method, flow rate sensor, and flow rate characteristic function identification program that can set a flow rate characteristic function reflecting not only the type or shape of a fluid resistance but also the effects of states such as an attachment state of the fluid resistance, and calculate a flow rate with higher accuracy. An actual flow rate characteristic function, which is a flow rate characteristic function when an actual fluid resistance is provided in a flow path, is identified on the basis of multiple flow rate characteristic functions including a first reference flow rate characteristic function and a second reference flow rate characteristic function, and predetermined weighting.

Flow rate characteristic function identification method, flow rate characteristic function identification device, storage medium storing flow rate characteristic function identification program, and flow rate sensor or flow rate control device using them

To accurately calibrate fluid control equipment. A flow rate calculation system includes: a container in which gas is enclosed; a weight measurement part on which the container is disposed; a gas line which connects the container and fluid control equipment and in which the gas flows; and an enclosing line for enclosing the gas in the container disposed on the weight measurement part, thereby allowing the gas to flow from the container to the fluid control equipment or from the fluid control equipment to the container in a state that the container is disposed on the weighing measurement part, and calculating a flow rate of the gas flowing to the fluid control equipment based on an output value outputted from the weight measurement part, and the container and the weight measurement part are adapted to be placed in a decompressed decompression chamber.

Flow rate calculation system and flow rate calculation method

A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together. A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.

Flow restrictor

A fluid mass flow controller, particularly adapted for controlling mass flow rates of toxic and reactive gases used in semiconductor device fabrication, includes a control circuit connected to pressure sensors for sensing the differential pressure across a flow restrictor in the mass flow controller for controlling a valve to control the fluid mass flow rate to a setpoint. The control circuit compares the differential pressure with the downstream pressure at a measured temperature with a data set of a gas passing through the flow controller for a range of differential pressures and downstream pressures and adjusts the flow control rate accordingly. The flow controller is mechanically uncomplicated including a two part body for supporting the pressure sensors, a remotely controllable flow control valve and the flow restrictor. The flow restrictor may comprise an orifice or nozzle but preferably comprises a sintered metal plug having a predetermined porosity for the expected materials and flow conditions to which the flow controller will be exposed. Process gases to be controlled by the flow controller are tested to provide data sets of mass flow rates at selected temperatures for a range of differential pressures across a flow restrictor and a range of downstream pressures.

Fluid flow controller and method of operation

This invention is a guard for preventing the vandalism of the keypad of a telephone. If the telephone is a pay telephone, the invention further prevents, thus preventing entry into the telephone money box from the upper housing area. The telephone guard, composed of an upper housing guard and a keypad guard, is secured by high strength visible fasteners to the upper housing of a pay telephone. The upper housing guard and keypad guard are mated tightly to prevent vandals from prying off the keypad guard. The thickness of the keypad guard is greater than the throw length of the push buttons of the keypad. Thus, the force of a blow to the keypad will be absorbed by the front of the guard rather than the push buttons.

Telephone keypad guard

A process mass flow instrument for measuring the mass flow rate of a process fluid including a fluid inlet, a fluid outlet, a flow passage connecting the fluid inlet and the fluid outlet, a fluid flow sensor which provides a raw output signal corresponding to an unknown mass flow rate and a processor which contains an empirically derived conversion routine for converting the raw output signal to an adjusted signal indicating the mass flow rate of the process fluid. A method for determining an unknown mass flow using an empirically derived conversion function, the function being derived by correlating the output signals of a mass flow instrument sensing the flow of a calibration fluid with the output signals of the mass flow instrument sensing the flow of the process fluid.

Method and apparatus for detecting and controlling mass flow

Growing community of inventors

Sparks, NV, United States of America

William W White