Mitutoyo Corporation

William Todd Watson

Robert Kamil Bryll

Shannon Roy Campbell

Isaiah Freerksen

A workpiece inspection and defect detection system includes a light source, a lens that inputs image light arising from a surface of a workpiece, and a camera that receives imaging light transmitted along an imaging optical path. The system utilizes images of workpieces acquired with the camera as training images to train a defect detection portion to detect defect images that include workpieces with defects. Anomaly detector classification characteristics are determined based on features of the training images. Run mode images of workpieces are acquired with the camera, and based on determined features from the images, the anomaly detector classification characteristics are utilized to determine if the images of the workpieces are classified as anomalous. In addition, the defect detection portion determines if images are defect images that include workpieces with defects and for which additional operations may be performed (e.g., metrology operations for measuring dimensions of the defects, etc.)

Workpiece inspection and defect detection system including monitoring of workpiece images

A workpiece inspection and defect detection system includes a light source, a lens that inputs image light arising from a surface of a workpiece, and a camera that receives imaging light transmitted along an imaging optical path. The system utilizes images of workpieces acquired with the camera as training images to train a defect detection portion to detect defect images that include workpieces with defects, and determines a performance of the defect detection portion as trained with the training images. Based on the performance of the defect detection portion, an indication is provided as to whether additional defect images should be provided for training. After training is complete, the camera is utilized to acquire new images of workpieces which are analyzed to determine defect images that include workpieces with defects, and for which additional operations may be performed (e.g., metrology operations for measuring dimensions of the defects, etc.)

Workpiece inspection and defect detection system indicating number of defect images for training

A tunable acoustic gradient (TAG) lens includes an acoustic wave generating element and a refractive fluid in a casing cavity surrounded by a lens casing. The lens casing includes case ends which each include a window configuration, a case end rim portion and an enhanced axial compliance portion. The window configuration includes a window and a window mounting portion having an overall window mount dimension along the axial direction. The enhanced axial compliance portion is coupled between the window mounting portion and the case end rim portion and includes a reduced thickness region characterized by a material thickness that is at most 75% of the associated window mount dimension. The axial compliance portion is configured to enhance the axial deflection of the window mounting portion compared to the case end rim portion, when a periodic drive signal is applied to the acoustic wave generating element.

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Kirkland, WA, United States of America

William Todd Watson