Cvc Products, Inc.

Other

William Starks

Mehrdad M Moslehi

Thomas R Omstead

William J Messner

Panya Wongsenakhum

Edward J Nagy

A method and system for fabricating a device on a substrate with a process gas, such as with chemical vapor deposition. A reaction chamber and support chuck cooperate to form a low conductance configuration for axisymetric process gas flow over the substrate and to form a high conductance configuration for enhanced evacuation of residual process gas from the reaction chamber upon completion of the process. A dual conductance chuck has an indented region that aligns with the exhaust port of the reaction chamber to restrict process gas flow in the low conductance configuration, and that moves distal a showerhead and the exhaust port to provide reduced restriction of process gas flow for reaction chamber evacuation. The chuck includes thermal control for enhancing film deposition on the substrate and for reducing residual film deposition on the chuck. An evacuation opening in the housing provides independent evacuation of residual gas from the housing. The present invention enhance throughput of device formation by reducing purge and process cycle times.

Apparatus for supporting a substrate in a reaction chamber

A universal anchor bolt template including a plate member having a square configuration. The plate member has planar upper and lower surfaces. The plate member has a plurality of apertures therethrough arranged in at least one group of four radial aperture lines. The apertures are spaced along each of the aperture lines in the group at corresponding distances, such that the use of corresponding apertures allows the anchoring bolts to be positioned in a square configuration with a selected center-to-center distance. Each of the apertures is surrounded by at least one concentric knock-out for allowing the apertures to be enlarged for the use of larger anchoring bolts than could be accommodated by the apertures.

Universal anchor bolt template

System for fabricating a device on a substrate with a process gas

Apparatus for dispensing gas for fabricating substrates

Method for fabricating a device on a substrate

Method and system for dispensing process gas for fabricating a device on a substrate

A hinge-lock security system for preventing relative motion between a door and a door frame.

Hinge-lock security system

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Victor, NY, United States of America

William Starks