Thermo Electron Scientific Instruments Corporation

William Robert Keefe

Francis Jerome Deck

William A Bayer

Alan Ronemus

Peter Steinberg

Carla S Draper

Min Yan

Gang Feng

An optical measurement system measurement system for examining a sample. The measurement system comprises an internally reflective element, a stage, an optical assembly, a chassis, and a sensor. The internally reflective element has a contact surface. The stage is positioned below the internally reflective element. The stage and the internally reflective element are configured to apply a force to the sample. The optical assembly comprises a light source and a light detector. The optical assembly is configured to scan the sample by directing source light from the light source towards the contact surface and detecting source light optically interacting with the contact surface by the light detector. The chassis is configured to support the optical assembly and the internally reflective element. The sensor is mounted to the chassis and configured to detect the force applied to the sample by the internally reflective element and the stage.

Method and apparatus for determining a force applied to a sample during an optical interrogation technique

An embodiment of a calibration element for an analytical microscope is described that comprises a substantially non-periodic pattern of features that exhibit contrast when illuminated by a light beam.

System and method of dimensional calibration for an analytical microscope

Growing community of inventors

Oconomowoc, WI, United States of America

William Robert Keefe