International Business Machines Corporation

William Robert Copeland

Joseph P DeGeorge

Scott Matthew Hargash

Robert S Young

Matthew F Stanton

Gregory S Boettcher

Bryant L Hancock

William T Petry

Joseph Casaregola

Kevin R Geysen

A system and method for detecting leaks in pressurized or vacuum pipes is disclosed. A pipe clamp comprises a housing that surrounds a pipe fitting. A containment chamber within the pipe clamp prevents leaked gas from escaping into the environment. The pipe clamp is installed in series with an exhaust line to remove the leaked gas from the containment chamber. A sensor may be configured and disposed to detect a change in pressure in the containment chamber to indicate the occurrence of a leak.

Pipe monitoring system and method

An apparatus for implementing an emergency machine off circuit of a fabrication system, includes: at least one safety switch adapted for shunting an operation enable signal from a piece of equipment selected for removal from service, the switch also removing from service supplemental devices for the selected equipment. A semiconductor fabrication system and a method for removing equipment from service are provided.

Emergency machine off feature with safety control interface

Growing community of inventors

Poughkeepsie, NY, United States of America

William Robert Copeland