Applied Materials, Inc.

William R Clements, Iii

Alexander T Schwarm

Shawn B Smith

Y Sean Lin

Tony Davis

Manjunath Yedatore

Brian P Grigsby

Hung J Pham

A method and apparatus for diagnosing faults. Process data is analyzed using a first metric to identify a fault. The process data was obtained from a manufacturing machine running a first recipe. A fault signature that matches the fault is identified. The identified fault signature was generated using a second metric and/or a second recipe. At least one fault class that is associated with the fault signature is identified.

Metrics independent and recipe independent fault classes

A method for data mining information obtained in an integrated circuit fabrication factory ('fab') that includes steps of: (a) gathering data from the fab from one or more of systems, tools, and databases that produce data in the fab or collect data from the fab; (b) formatting the data and storing the formatted data in a source database; (c) extracting portions of the data for use in data mining in accordance with a user specified configuration file; (d) data mining the extracted portions of data in response to a user specified analysis configuration file; (e) storing results of data mining in a results database; and (f) providing access to the results.

Method and apparatus for analyzing manufacturing data

Growing community of inventors

Austin, TX, United States of America

William R Clements, Iii