Mks Instruments, Inc.

Other

William R Clark

Ali Shajii

Matthew Mark Besen

Siddharth P Nagarkatti

Daniel Alexander Smith

Bora Akgerman

Donald K Smith

Junhua Ding

Jesse E Ambrosina

Michael L'Bassi

Nicholas Kottenstette

Kaveh H Zarkar

James H Ewing

John Christopher Hallahan

Matthew Thomas Taylor

A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to be delivered, and a controller connected to the valves, the pressure transducer and the input device. The controller is programmed to receive the desired mass from the input device, close the second valve and open the first valve, receive chamber pressure measurements from the pressure transducer, and close the inlet valve when pressure within the chamber reaches a predetermined level. The controller is then programmed to wait a predetermined waiting period to allow the gas inside the chamber to approach a state of equilibrium, then open the outlet valve at time=t, and close the outlet valve at time=t* when the mass of gas discharged equals the desired mass.

Pulsed mass flow delivery system and method

An integrated pressure and flow ratio control system includes N mass flow controllers MFC(i=1, . . . , N) that each control the flow rate of a fluid F(i=1, . . . , N) flowing into a processing chamber. These N mass flow controllers are linked together by a digital communication network. One of the mass flow controllers is a master MFC, and the remaining N&#x2212;1 MFCs are slave MFCs. The master MFC receives a pressure set point and a plurality N of flow ratio set points from a host controller, and communicates these set points to all the slave MFCs. In this way, the pressure in the chamber is maintained at the pressure set point and the flow ratios Q/Qare maintained at the flow ratio set points, where Qis flow rate of the i-th fluid F, and Q=Q+Q+ . . . Qis the sum of all N flow rates.

Integrated pressure and flow ratio control system

A system for delivering pulses of a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber. A controller is programmed to receive the desired mass for each pulse through an input interface, close the second valve and open the first valve, receive chamber pressure measurements from a pressure transducer, and close the first valve when pressure within the chamber rises to a predetermined upper level. The controller is also programmed to deliver pulses of gas using just the second valve, wherein, for each pulse, the second valve is opened until a calculated mass for the pulse equals the desired mass for the pulse. The first valve is not required to be opened and closed for each pulse and is, therefore, used less frequently and has an extended life.

A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.

Apparatus and method for pressure fluctuation insensitive mass flow control

A system for dividing a single flow of gas into two or more secondary flows of known, precise values, without requiring a high upstream pressure. The system includes an inlet for receiving the single gas flow, and first and second flow lines connected to the inlet. A mass flow meter measures gas flow through the first line and provides a signal indicative of the measured flow rate. A restrictor restricts gas flow through the first line to a desired flow rate, and has a smallest cross-sectional flow area selected to provide an upstream pressure high enough to allow the mass flow meter to operate properly and lower than a predetermined upper pressure limit. A mass flow controller receives the signal indicative of the measured flow rate from the mass flow meter and maintains a flow rate through the second line based on the signal.

System and method for dividing flow

Disclosed is an improved tool for washing the perforations in an oil or gas well bore casing. The tool includes a tubular mandrel having orifices, between pairs of pressure sealing packer cups, for discharging a cleaning fluid into the area between the tool and the casing. The longitudinal spacing between the packer cups is variable by means of variable length spacer sleeves placed between the packer cups. The mandrel having an axial internal by-pass tube for passing cleaning fluid and debris through the mandrel. The by-pass tube having a telescoping section for accommodating the elongation and contraction of the tube due to temperature changes. The by-pass tube also permits entering the tool into the casing by eliminating vacuum or pressure build-up in the casing.

Perforation circulating washer

Servo control of a butterfly valve or the like, in which fluid flow is inherently non-linearly related to angular orientations of a vane or plug member, is effected through a function-generator mechanism interposed to render the system transfer function substantially constant. A function generator serving those purposes includes a mechanical cam-and-follower unit through which valve-controlling angular movements are maintained in a cosine-related slaving with angular movements of the rotor of an electrical servo motor.

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Hampstead, NH, United States of America

William R Clark