Texas Instruments Corporation

William Pressnall

Richard L Guldi

Frank D Poag

A system ( ) is disclosed for cleaning a vertical furnace ( ) pedestal ( ) and cap ( ) including at least one inlet conduit ( ) in fluid communication with a pressurized cleaning medium source ( ). The system also includes at least one exhaust conduit ( ) in fluid communication with a negative pressure source ( ). A boat assembly ( ) may be positioned such that the at least one conduit ( ) is operable to direct cleaning medium at the boat assembly ( ) to dislodge contaminate particles associated with the boat assembly. The exhaust outlet ( ) then evacuates the cleaning medium and any dislodged contaminate particles. The system may operate automatically within a closed processing environment and after each process cycle.

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Richardson, TX, United States of America

William Pressnall