Asyst Technologies, Inc.

William P Pennybacker

Mark Vincent Smith

Robert P Wartenbergh

The present invention includes a latch assembly, such as maybe useful for SMIF pods. SMIF pods are in general comprised of a pod door which mates with a pod shell to provide a sealed environment in which wafers may be stored and transferred. During wafer storage and transport, the pod door is typically held affixed to the pod shell by a latch assembly. When it is desired to separate the pod door from the pod shell, each latch must be actuated outwardly, to withdraw each engagement portion from the pod door, at which time the pod door may be separated. The present invention includes an improved such latch assembly.

SMIF container latch mechanism

The present invention is a support structure for supporting a reticle or silicon wafer. The support structure includes a support column and a retaining structure. In addition to retaining a wafer, the present invention also creates a discharge path to remove electrostatic charges from the wafer. The retaining structure mechanically engages each support column to create a discharge path from the wafer to a ground. Specifically, electrostatic charges that dissipate from the wafer travel along the support structure to the support column and exit the SMIF pod through the pod door.

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Tracy, CA, United States of America

William P Pennybacker