Keravision, Inc.

Other

Intel Corporation

Optical Perspectives Group, L.l.c.

Zygo Corporation

Kla Tencor Corporation

William P. Kuhn, Ph.d., LLC

William P Kuhn

Phillip C Baker

Robert E Parks

Lawrence A Booth

Edward John Bawolek

Curt Corum

Thomas A Silvestrini

John Anthony Scholl

Isidro Matias Gandionco

Matthew Brian Dubin

Amin Samsavar

Bryan E Loucks

Robert Steven LeCompte

Thomas Harding McWaid

Christopher James Evans

Michael Weber

John Clyde Stover

Michael R Jacobson

A device and method for subaperture stray light detection and diagnosis. A test light beam is generated. Stray light is detected. Based on the detected stray light, potential paths that light may have taken to arrive at the detection surface are determined. A testing device comprises a test light beam source whereby the cross sectional area of the test light beam is made less than the cross sectional area of the system aperture. A relative lateral positioning stage and an angular beam directing stage launch the test light beam into the aperture. A detector and a data processing system produce a data set relating the stray light to the location and directional angles of the test light beam to identify the sources of stray light. A light trap and test light beam delivery system are provided.

Device and method for subaperture stray light detection and diagnosis

A Fizeau or other interferometer is used to provide high resolution, in-situ calibration of an external angle measurement system such as widely spaced high stability plane mirror interferometers (HSPMIs)). The calibrated measurement system then measures mechanical tilt during shearing. The tilt data is used to correct the sheared data, preferably before computation of the rotationally invariant (RI) terms. Alternatively, the data may be used to compute the spurious quadratic term and correct after integration.

Method and apparatus for tilt corrected lateral shear in a lateral shear plus rotational shear absolute flat test

A method and apparatus for color calibrating an imager device is disclosed. The imager device is subjected to a plurality of light sources. Color channel responses are obtained from the imager device and the color calibrating coefficients are determined.

Apparatus and method for imager device color calibration using spectral light source

An interferometer is provided, comprising a source, a unit under test (UUT) with at least a first surface and second surface, a reflective optic, a detector and light from the source. The light is transmitted through the unit under test and reflects off of the reflective optic, which directs the light back to the unit under test. A first portion of light is reflected off the first surface of the UUT. A second portion of light is reflected off the second surface of the UUT. The first and second portions of light are then reflected by the reflective optic and are then transmitted through the UUT. The two portions of light are incident on the detector, where the first and second portions of light coherently add and the interference pattern is detected by the detector. A method for measuring the transmitted wavefront of the UUT is also provided.

Interferometer for measurement of dome-like objects

A test surface of a test object is measured with respect to a reference surface to generate a first relative surface measurement, where the test surface is in a first position relative to the reference surface. The test surface is measured with respect to the reference surface to generate a second relative surface measurement, where the test surface is in a second position relative to the reference surface different from the first position. Estimates of a rotationally varying part of a measurement of the test surface and a rotationally varying part of a measurement of the reference surface are provided. An estimate of a rotationally invariant part of the measurement of the test surface is calculated at a plurality of radial values based on a combination of the relative surface measurements, the provided estimates, and a difference between the first and second relative positions.

Precision surface measurement

A point source module is provided, comprising: a Shack cube comprising a beam splitter cube with an attached spherical reference surface defining a reference arm; a test arm that is associated with transmission of optical radiation from a source to a sample; a point source of optical radiation whose emissions traverse both the reference arm and the test arm; and a detector associated with a surface of the beam splitter cube and receiving optical radiation from both the reference arm and the test arm and comprising a detector arm, an objective lens associated with the test arm, or both. Further, a method of aligning the point source module is provided, along with a method of using the point source microscope is provided. The apparatus and methods provide a compact, robust device and technique for measuring or locating optical or mechanical datum of parts that are being manufactured or assembled.

Point source module and methods of aligning and using the same

A modular dual-beam source, sample compartment and beam-combining system are provided when used with a monochromator and detector to form a spectrophotometer consisting of: (a) a source module where two ellipsoidal mirrors each produce an image of the light source, and (b) a reflecting sample-compartment module, wherein each side has two plane-mirrors, of the four plane mirrors, three are reference and one is the sample, or (c) a transmission sample-compartment module, wherein each side has two plane-mirrors, and a sample is placed between one pair of plane-mirrors, and (d) a beam-combining module wherein the source images are imaged by a second pair of ellipsoidal mirrors on a reflective chopper that combines the images at a single location that is imaged, external to the module, by another mirror, each module being kinematically located with respect to each other so the system remains optically aligned as modules are interchanged.

Dual beam spectrophotometer modular sample system

A dual field of view optical system and a single, lower cost detector are utilized, rather than using a large CCD camera or multiple CCD cameras, to view a sample that has two or more small areas that need to be measured, which are too far apart to fall on the detector but are within the field of view of the objective, or to measure a long, narrow strip that is too long for the detector, but whose total area is less than the detector area. The dual field of view optical system is employed in a microscope which comprises: (1) an illuminator arm with an illumination source and a field stop, (2) a beam splitter, (3) an objective, (4) a sample plane for location of a sample to be observed, and (5) a detector arm, with the illuminator arm configured to illuminate the sample plane through the beam splitter and the objective and with the detector arm configured to receive an image of the sample and including the dual field of view optical system. The dual field of view optical system comprises two beam splitters, two mirrors and one detector, the two beam splitters in the same plane and the mirrors disposed on either side of the beam splitters, an entrance portion for receiving the image from the sample and an exit portion for directing the image onto the detector.

Dual field of view optical system for microscope, and microscope and interferometer containing the same

A differential interference contrast (DIC) microscope system is provided comprising: (a) an illumination source for illuminating a sample; (b) a lens system for viewing the illuminated sample, including an objective, defining an optical axis; (c) a DIC prism having a shear angle for separating an input light beam into two, orthogonally polarized output beams that are separated by the shear angle; (d) at least one detector system for receiving a sample image; (e) a mechanism for modulating the phase of the DIC image; (f) a mechanism for selecting the wavelength of light used in acquiring at least two sets of DIC data taken in a single shear direction; and (g) a mechanism for manipulating the multiple DIC data sets to synthesize data that appear to have been taken at a longer synthetic wavelength. The various approaches disclosed and claimed herein permit the measurement of surfaces with a greater slope than is possible with a single wavelength or shear distance. The methods disclosed herein are applicable to measurement of slope in a single direction or in two directions. The disclosed methods are also compatible with the methods and devices of wavelength multiplexed quantitative DIC microscopy for obtaining slope data in two directions. An additional benefit of the disclosed techniques is the retention of the measurement sensitivity of a shorter wavelength or longer shear distance while increasing the measurement range corresponding to the long, effective wavelength obtained. However, the measurements are still limited to within the depth of focus of the microscope.

Multiple wavelength or multiple shear distance quantitative differential interference contrast microscopy

A differential interference contrast (DIC) microscope system is provided comprising: (a) an illumination source for illuminating a sample; (b) a lens system for viewing the illuminated sample, including an objective, defining an optical axis; (c) at least one detector system for receiving a sample image; (d) mechanisms for wavelength multiplexing the shear direction or shear magnitude or both on the sample and demultiplexing the resultant DIC images on the detector; and (e) a mechanism for modulating the phase of the interference image. Various approaches are disclosed to accomplish wavelength multiplexing of shear direction and demultiplexing the two DIC images that result. It is possible for the two, wavelength multiplexed DIC images to differ in either or both shear direction or magnitude. These approaches include (1) two DIC microscopes, each operating at a different wavelength, but which share a single objective through a beam splitter; (2) a segmented DIC prism that is made in four sections where opposite sections are paired and have the same shear direction and amount, and each pair of sections have filters transmitting different wavelengths; (3) a segmented DIC prism that is located in or near an aperture stop or pupil of said DIC microscope to obtain data in two shear directions that is multiplexed by wavelength; (4) a dual field-of-view optical system with two DIC prisms, one in each path to wavelength multiplex shear direction or shear magnitude through said objective; (5) demultiplexing wavelength multiplexed DIC images through the use of a wavelength selective beam splitter and two detectors; (6) demultiplexing wavelength multiplexed DIC images through the use of a wavelength controlled source and a single detector; and (7) demultiplexing wavelength multiplexed DIC images through the use of dual field-of-view optics and a single detector. These various approaches permit rapid, robust measurement of slope in two directions. Further, phase shifting and DIC microscopy are limited to measurements within the depth of focus (DOF) of the objective while WLI microscopy is not.

Wavelength multiplexed quantitative differential interference contrast microscopy

Method for imager device color calibration utilizing light-emitting diodes or other spectral light sources

A method and apparatus for performing a surgical procedure on a patient is described. An incision is made into tissue of the patient to create a tissue pocket. The tissue has an anterior surface. Preferably, the tissue is corneal tissue of an eye. A reflective element is inserted into the pocket. An energy source generates a radiant energy signal, which is directed toward the reflective element. Reflected energy is received from the reflective element. A detector determines the depth of the reflective element below the anterior surface based upon the energy reflected by the reflective element. The speed of transmission of the radiant energy in the reflective element is different (preferably slower) than the speed of transmission of the radiant energy in the tissue. The reflective element may be in the form of a tool on which is disposed a biocompatible polymer layer, the layer comprising trapped air spaces, or a tool having an open space for containing trapped air. The radiant energy may take the form of ultrasound generated by an ultrasonic probe, or light generated by a confocal microscope. The confocal microscope may employ longitudinal chromatic aberration to measure the depth of the reflective element. When employing a confocal microscope, the depth of the reflective element is a function of the reflected energy from the anterior surface and the reflected energy from the reflective element.

Method and apparatus for measuring corneal incisions

An optical profilometer and a stylus probe measuring device used in the same instrument have the advantage that these two sensors can be quickly switched between each other. This can be an advantage when used to measure samples, since the optical profilometer can be used until a sample is found to be outside of the desired tolerances. Afterwards, the stylus probe measuring device can be used to accurately determine the profile data. This is an advantage because an optical profilometer is relatively quick, and the stylus probe measuring device is relatively accurate. Additionally, since the optical profilometer and stylus probe device are in the same instrument, the X and Y positions of these devices can be interrelated accurately. This allows images to be produced where the positions on the images can be easily correlated. For example, measurement cursors in sensor data displays can correlated by the positional offset information.

Growing community of inventors

Tucson, AZ, United States of America

William P Kuhn