Fei Comapny

William N Parker

Mark Utlaut

Milos Toth

Noel S Smith

Gregory A Schwind

Marcus Straw

Sean Kellogg

Anthony Graupera

Shouyin Zhang

Andrew B Wells

Libor Novak

Marek Uncovsky

Walter Skoczylas

Mark Emerson

Martin Cafourek

An environmental cell for a charged particle beam system allows relative motion between the cell mounted on an X-Y stage and the optical axis of the focusing column, thereby eliminating the need for a sub-stage within the cell. A flexible cell configuration, such as a retractable lid, permits a variety of processes, including beam-induced and thermally-induced processes. Photoelectron yield spectroscopy performed in a charged particle beam system and using gas cascade amplification of the photoelectrons allows analysis of material in the cell and monitoring of processing in the cell. Luminescence analysis can be also performed using a retractable mirror.

Environmental cell for charged particle beam system

An inductively coupled plasma charged particle source for focused ion beam systems includes a plasma reaction chamber with a removably attached source electrode. A fastening mechanism connects the source electrode with the plasma reaction chamber and allows for a heat-conductive, vacuum seal to form. With a removable source electrode, improved serviceability and reuse of the plasma source tube are now possible.

Method for attachment of an electrode into an inductively-coupled plasma

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Hillsboro, OR, United States of America

William N Parker