Photon Dynamics, Inc.

William K Pratt

Sunil S Sawkar

Reza Safaee-Rad

Jeffrey A Hawthorne

Ray Leerentveld

Alexander J Nagy

Aleksander Crnatovic

David L Freeman

Owen Y Sit

Bernard T Clark

Integrated inspection and test systems for liquid crystal display (LCD) active plates. The integrated inspection and test systems may combine visual imaging inspection and an electronic sensing such as voltage imaging, electron beam sensing or charge sensing, in which the potential defect information obtained by the visual inspection system is combined with the potential defect information obtained by the electronic sensing system to produce a defect report. One or more high-resolution visual cameras are scanned over a stationary plate, and the image data from the camera(s) is processed to detect potential defects. A high-resolution electronic sensing system examines the stationary plate, and the image data from the sensor(s) is processed to detect potential defects. The potential defects from the visual image data and electronic sensing image data are processed to produce the final defect information.

Integrated visual imaging and electronic sensing inspection systems

A method for inspecting a display panel includes capturing images of a portion of a plurality of display panels having display elements with an image acquisition device having sensor elements, each image comprising an image of approximately a first number of display elements captured with approximately a second number of sensor elements, the first number different from the second number, each image including a Moir&#xe9; artifact pattern, combining the images of the portion of the plurality of display panels to form a reference image including a Moir&#xe9; artifact pattern reference, capturing a sample image of a portion of a sample display panel having display elements with the image acquisition device, the sample image comprising an image of approximately the first number of display elements on the sample display captured with approximately the second number of sensor elements, the sample image including a sample Moir&#xe9; artifact pattern, combining the sample image with the reference image to inhibit the sample Moir&#xe9; artifact pattern from the sample image, and to form a test image, determining defects in display elements in the portion of the sample display panel by inspecting the test image, and determining whether to reject the sample display panel in response to the defects in the display elements.

Moir&#xe9; suppression method and apparatus

A color optical inspection system extracts only such luma and chroma spatial features as are necessary for detection of defects related to the physical characteristics of devices populating the surface of a board. During the training phase, the features of each device present on each of a number of golden boards is extracted and compared against a set of established criteria, thereby to select one or more spatial features to be extracted for the associated devices during the inspection phase. A match region whose boundaries are defined by the selected features of the devices on the golden boards is established during the training phase. During the inspection phase, the selected features of each associated device are extracted to determine whether they fall inside the match region. If the extracted features falls outside the corresponding match region, then a defect is reported.

Color optical inspection system

A method for locating blobs in an image, includes the steps of: forming a blob reference mask from the image, the blob reference mask including a portion indicating a portion of the image containing a first blob, if any, and forming a reference image from the image, the reference image corresponding to the image. The method also includes the steps of forming a modified image from the image by replacing the portion of the image containing the first blob, if any, with a portion of the reference image corresponding to the portion of the image, and locating a second blob in the image in response to the modified image.

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Los Altos, CA, United States of America

William K Pratt