Other

Cvc Products, Inc.

Veeco Instruments Inc.

William J Messner

Mehrdad M Moslehi

Thomas R Omstead

William Starks

Panya Wongsenakhum

Edward J Nagy

Yong Jin Lee

Ahmad Kermani

Rajul V Randive

An attachable, detachable pressure reducing regulator for use with a primary high-pressure gas source, wherein the high-pressure chamber of said regulator includes a secondary gas IN portal, with a one-way valve, through which the primary container source may be refilled from an external gas source, via the high-pressure chamber of the said regulator, either independently of or concurrently during its use as a pressure reducing regulator.

Bi-directional regulator system for simultaneous high-pressure filling and low-pressure depleting of gas tank

A mountable Multiple Port Distribution Manifold consisting of a selector knob through which a gas of liquid media may internally flow, between a hollow port at one end and a side port of the rotate-able Shaft within the Manifold. By rotating the Knob/Shaft, the side hole port of the Knob/Shaft assembly may selectively intersect with multiple ports within the Manifold. Said assembly also provides of an 'off' position, where no Shaft/Manifold intersection allows port to port connection. The invention may be constructed of any suitable material, natural or synthetic, that is sufficiently strong to withstand the internal pressures of a gas or liquid media routed within.

Multiple port distribution manifold

A mountable Multiple Port Distribution Manifold consisting of a selector knob through which a gas of liquid media may internally flow, between a hollow port at one end and a side port of the rotatable Shaft within the Manifold. By rotating the Knob/Shaft, the side hole port of the Knob/Shaft assembly may selectively intersect with multiple ports within the Manifold. Said assembly also provides of an 'off' position, where no Shaft/Manifold intersection allows port to port connection. The invention may be constructed of any suitable material, natural or synthetic, that is sufficiently strong to withstand the internal pressures of a gas or liquid media routed within without leakage.

A system for delivering multiple life-support services within a flexible protective covering, a plurality of different breathing gasses, safety tether, a plurality of ancillary lines for documentable, multidirectional, multi-format data/communications acquisition and delivery, personal/situational awareness and ancillary power sources for tool, accessory or device enervation, to a plurality of Users in an adverse environment.

Integrated umbilical delivery system for gas, data, communications acquisition/documentation, accessory power and safety for users in adverse environments

One design embodiment of a holder for a container comprising: one or more bands each capable of retaining a container inside the band(s), with straps attached to and extending away from the exterior of the band(s); with fasteners on the ends of each strap such that container within the band or bands are held in a stable position relative to a harness to be worn by a user. The design embodiment allows easy attachment, use and deployment of containers in a variety of environmental conditions and situational uses, including but not limited to the carrying of gas supplies for underwater divers.

Container holder with fasteners

A two-stage vaporizer includes two vaporizing stages joined by a vaporization chamber located gravitationally below the first vaporizing stage and gravitationally above the second vaporizing stage. A separator covering an outlet within the vaporization chamber allows vaporized precursor from both vaporizing stages to pass through the outlet to chemical vapor deposition system and prevents any remaining liquid precursor from passing through the outlet. The liquid precursor is premixed with carrier gas just prior to entry into the vaporizer. Additional flows of carrier gas pass through the two vaporizing stages in opposite directions to carry the vaporized precursor to the outlet.

High throughput vaporizer

A method and system for fabricating a device on a substrate with a process gas, such as with chemical vapor deposition. A reaction chamber and support chuck cooperate to form a low conductance configuration for axisymetric process gas flow over the substrate and to form a high conductance configuration for enhanced evacuation of residual process gas from the reaction chamber upon completion of the process. A dual conductance chuck has an indented region that aligns with the exhaust port of the reaction chamber to restrict process gas flow in the low conductance configuration, and that moves distal a showerhead and the exhaust port to provide reduced restriction of process gas flow for reaction chamber evacuation. The chuck includes thermal control for enhancing film deposition on the substrate and for reducing residual film deposition on the chuck. An evacuation opening in the housing provides independent evacuation of residual gas from the housing. The present invention enhance throughput of device formation by reducing purge and process cycle times.

Apparatus for supporting a substrate in a reaction chamber

System for fabricating a device on a substrate with a process gas

Apparatus for dispensing gas for fabricating substrates

Method for fabricating a device on a substrate

Method and system for dispensing process gas for fabricating a device on a substrate

A system for rapid thermal processing of a substrate in a process chamber while measuring and controlling the temperature at the substrate to establish substantially uniform substrate temperature in real time. The system includes an axisymmetrical multi-zone illuminator having a plurality of substantially concentric rings of heating lamps to direct optical power toward said substrate, a fluid cooled optical reflector facing the substrate frontside and having a relatively high optical reflectivity. The system also includes a multizone temperature measurement system having a plurality of pyrometry sensors coupled to said multi-zone illuminator, a system for real-time measurement and compensation of substrate emissivity and illuminator lamp light interference effects, and a multi-variable temperature controller for providing multi-zone real-time temperature control. The system also incorpotates a plurality of illuminator lamp power supplies.

Growing community of inventors

Mt. Morris, NY, United States of America

William J Messner