Silbond Corporation

William J Corbett

Walter L Magee

A stable suspension of ethylpolysilicate nanoparticles having a size of between about 5 nm and 120 nm are in water and stabilized with between about 0.05 and 5 weight percent tetraalkylammonium hydroxide. The particles are between about 95% and 99.5% hydrolyzed and have superior removal rates when used in chemical mechanical polishing. A process for making ethylpolysilicate nanoparticles includes the step of adding reverse osmosis water and 25% tetramethylammonium hydroxide and ammonium hydroxide to a reactor, agitating the mixture and heating the mixture to about 80&#xb0; C. Tetraethylalkoxy silane is added to the mixture and the mixture stirred and hydrolyzed. Ethanol is then removed. The mixture was then subjected to a vacuum to remove additional distillate. The material left in the reactor was then transferred to a plastic drum.

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Harbor Springs, MI, United States of America

William J Corbett