Lucent Technologies Inc.

American Telephone & Telegraph Co., At&t Bell Laboratories

William Henry Grodkiewicz

Allan James Bruce

Yiu-Huen Wong

George J Zydzik

Joseph Shmulovich

Utpal Kumar Chakrabarti

Shobha Singh

Gerald Nykolak

Bertram Schwartz

Legrand G Van Uitert

Ping Wu

David T Ekholm

An active semiconductor device includes a coating comprising an oxide of tantalum and aluminum. The coating may function as an AR coating or as a passivation coating. Applications to ICs and optical devices are described.

Tantalum-aluminum oxide coatings for semiconductor devices

An active optical device comprises a glass, waveguiding structure disposed on a substantially planar principal surface of a substrate. The structure includes a silica-based, erbium-doped active core. The active core has an absolute erbium concentration of at least about 0.5.times.10.sup.20 atoms per cubic centimeter, and a radiative lifetime of the erbium lasing level of at least about 5 milliseconds. The active core does not contain significant amounts of alkali metals or alkaline earth metals but does contain at least two modifier metals. Also disclosed is a method for forming an active optical device, including the step of depositing an erbium-doped active core by sputtering.

Erbium-doped planar optical device

A fabrication technique is described for making various devices in which a type of glass is used as a surface protection layer. The glass layers are put down by particle bombardment (generally sputtering or e-beam bombardment) of a phosphorus-containing silicate glass target. Devices with such layers are also described. Such glass layers are highly advantageous as encapsulating material, diffusion barrier layers, etc., particularly for optical type devices and certain semiconductor devices. Particularly important is the preparation procedure for the glass target used in the bombardment process. The glass layers are moisture stable, act as excellent barriers against diffusion, and are usable up to quite high temperatures without cracking or peeling. The glass layers also provide long-term protection against atmosphere components including water vapor, oxygen, atmosphere pollution contaminants, etc.

Fabrication of devices using phosphorus glasses

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Glen Gardner, NJ, United States of America

William Henry Grodkiewicz