Microbeam Inc.

William G Turnbull

William P Robinson

Norman W Parker

An integrated charge neutralization and imaging system is disclosed. An energy analyzer is mounted directed above a target surface consisting of a 90 degree spherical electrostatic capacitor with variable voltage on both the inner and outer electrodes. Circular apertures are mounted at the entrance and exit of the analyzer to limit the fringing electric fields and define the beam size. An electrostatic lenses is used for focusing the beam from the electron gun into the virtual object plane of the energy analyzer. It is also used to collect secondary electrons or secondary ions leaving the energy analyzer and focused them into the imaging optics. A defector is used for steering the electron beam onto the axis of the lens. This deflector is also used to steer the secondary electrons or secondary ions into the electron/ion detector, or to steer the secondary ions into the SIMS mass filter entrance aperture. An electrons gun is used for providing a beam of electrons which is aimed towards the deflector, and then on through the lens and energy analyzer, finally ending up at the target surface. An imaging system employed by the present invention may include a channel electron multiplier or a secondary ion mass spectrometer system.

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Newbury Park, CA, United States of America

William G Turnbull