Silicon Genesis Corporation

William G Eng

Francois J Henley

Nathan W Cheung

Igor J Malik

The present invention provides an apparatus (,) (,) for abating edge material from a substrate, e.g., SOI. The apparatus includes, among other elements, a housing and a rotatable member (,) coupled to the housing. The rotatable member is a susceptor, which is relatively flat for securing a substrate. A movable dispensing head (,) is coupled to the housing and is overlying the rotatable member. The movable dispensing head (,) is operable to emit a stream of directed fluid to one or more locations of the susceptor. The apparatus also includes a fluid source, which is coupled to the movable dispensing head. The fluid source provides fluid to ablate material from the substrate.

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Milpitas, CA, United States of America

William G Eng