The Perkin-elmer Corporation

Redwood Microsystems, Inc.

William G America

Richard R Poole

A laminated structure includes a wafer member with a membrane attached thereto, the membrane being formed of substantially hydrogen-free boron nitride having a nominal composition B.sub.3 N. The structure may be a component in a mechanical device for effecting a mechanical function, or the membrane may form a masking layer on the wafer. The structure includes a body formed of at least two wafer members laminated together with a cavity formed therebetween, with the boron nitride membrane extending into the cavity so as to provide the structural component such as a support for a heating element or a membrane in a gas valve. In another aspect borom is selectively diffused from the boron nitride into a &lt;100&gt; surface of a silicon wafer. The surface is then exposed to EDP etchant to which the diffusion layer is resistant, thereby forming a channel the wafer member with smooth walls for fluid flow.

Boron nutride membrane in wafer structure

Boron nitride membrane in wafer structure and process of forming the same

A microdevice assembly includes a miniature fluid processing device of silicon with a fluid orifice therein. A high-silica glass attachment member sealed to the device has an aperture with a narrow portion aligned with the orifice and a conical portion with a conical wall diverging from the narrow portion. A tube with a soft graphite ferrule thereon is inserted into the conical portion. A rigid package member includes a base supporting the device, a cover disposed proximate the attachment member, and side walls connecting the base and the cover. A threaded opening through the cover is aligned with the aperture. An externally threaded nut with a hole therethrough is fitted slidingly over the tube, and is tightened into the threaded opening so as to sealingly compress the ferrule between the wall and the tube.

Fluid connector for microdevices

Liquid chromatography column coupling assembly having a column enclosed in a housing member to form a column cartridge and including coupling assemblies at respective ends of the cartridge, each comprising a coupler member and a collar member. The coupler member and collar member are tubular in configuration and disposed in coaxial telescoping relation with one end of the coupler member abutting the respective end of the column with an annular seal interposed therebetween. The collar member has one end threaded onto the end of the column housing and at its opposite end an inwardly extending radial flange coacting with an outwardly extending radial flange on said one end of the coupling member. Rotation of the collar member when threading it onto the column housing causes relative axial displacement of the members to compress the seal between the abutting ends of the column and coupler member.

High pressure column assembly for a liquid chromatograph system

A liquid chromatography column assembly includes a separation column having stationary phase retaining frits is positioned within a housing adapted to accept conventional column termination fittings. The assembly includes a sealed cylindrical cavity to ensure radial distribution of the incoming fluid across the cross-section of the column.

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Newtown, CT, United States of America

William G America