USA As Represented by Secretary of the Navy

Other

William F Henshaw

M Ashraf Imam

Richard K Everett

Virgil Provenzano

Anand K Singh

Kuntimadi Sadananda

In a magnetron sputtering device for high rate coating of various substrates with sputtered atoms, the sputtering occurs from the interior cavity wall composed of four individual rectangular plates and condenses onto a substrate passing axially through the cavity. Most of the atoms which do not condense on the substrate redeposit on a wall and are subsequently sputtered resulting in efficient target utilization. A few percent, depending on the length of the cavity, escape out the end and are lost to the deposition process. The magnetic field through the cavity is uniform and relatively constant such that the four rectangular targets evenly erode. The two opposing ends of the cavity are open for substrate movement through the deposition region. The magnetic field is generated by a solenoid and allows adjustment for sputtering of magnetic materials.

Rectangular cavity magnetron sputtering vapor source

Bulk form of superconducting materials are produced by pouring a melt a O.sub.2 -containing superconducting material into a heated mold, cooling the mold until solidification begins, removing the cast object from the mold, gradually cooling the cast object to prevent the development of thermal stresses, and then annealing the cast, cooled object to restore O.sub.2 to near equilibrium levels. The bulk form produced according to the present invention may be used as a sputtering target in the production of wires, or as a bulk form semiconductor.

Method of producing Bi-Sr-Ca-Cu-O superconducting materials in cast form

An improved metal, alloy, or intermetallic matrix composite containing carbon reinforcing fibers is formed. The carbon reinforcing fibers are protected from interaction with the matrix material by an inner and an outer barrier layer. The outer layer is any one of the group of stable, non-reactive ceramic materials used to protect fibers, and the inner layer is a ductile, low density, oxygen desorbing rare earth metal. The carbon fibers are particularly useful in forming composites with a titanium aluminide matrix.

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Lorton, VA, United States of America

William F Henshaw