Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno

William Edward Crowcombe

Hamed Sadeghian Marnani

Teunis Cornelis Van Den Dool

Jasper Winters

Geerten Frans Ijsbrand Kramer

Stefan Kuiper

Albert Dekker

Hendrik De Man

Theodorus Jacobus De Lange

Hajo Pieter Pereboom

Floris Clemens Maria Van Kempen

Jan De Vreugd

Gerrit Witvoet

A device for mounting a load to a carrier is described. The device includes a first support configured for fixation to the carrier; a second support configured for fixation to the load. The first and second supports are spaced away from each other viewed along a main load bearing axis of the device. The device further includes an outer shell extending along the main load bearing axis, and an inner member that is within the outer shell. The device includes a damping material connecting the inner member to at least the outer shell, wherein one of the outer shell and the inner member connects the first support and the second support to each other.

Device for mounting a load to a carrier, assembly, vehicle and methods

The invention is directed at a method of positioning a carrier on a flat surface using an positioning member, wherein the carrier comprises an upper part and a base which are connected to each other such as to be arranged remote from each other, wherein the positioning member is arranged between the base and the upper part such that the base is located at an opposite side of the positioning member with respect to the upper part of the carrier, the upper part resting on the positioning member prior to placing of the carrier onto the flat surface, wherein the upper part comprises three engagement elements, and wherein the positioning member comprises a support surface for receiving the three engagement elements of the upper part, said support surface including a plurality of sockets forming a kinematic mount for said three engagement elements, wherein the base comprises three landing elements, each landing element being associated with a respective one of the three engagement elements, and the method comprising the steps of: operating the positioning member for moving the carrier relative to the flat surface in a direction parallel thereto such as to position the carrier above a landing position; performing an action of placing the carrier on the flat surface at the landing position, said action of placing comprising: moving the base towards the flat surface until at least one of said landing elements is in contact with the flat surface and an associated engagement element of said engagement elements is released from the kinematic mount; continue said moving of the base relative to the flat surface until all landing elements are in contact with the flat surface; and continue said action of placing the carrier until all engagement elements are released from the kinematic mount.

Method of positioning a carrier on a flat surface, and assembly of a carrier and a positioning member

An optical assembly is manufactured by combining a first optical component with a second optical component. The optical components each comprise respective optical surfaces and alignment structures. The first optical surface is aligned with respect to the second optical surface by a connection between the alignment structures and their predefined relative positions with respect to the optical surfaces. The relative positions are determined by a high-accuracy manufacturing process such as diamond turning wherein, for each optical component, a respective alignment structure is manufactured together with a respect optical surface from a single work piece.

Optical assembly with high accuracy stable alignment between optical surfaces

The invention is directed at a positioning arm for positioning of a scan head of a surface scanning measurement device&#x2014;such as a scanning probe microscopy device&#x2014;relative to a surface. The positioning arm comprises a base at a first end thereof for mounting the arm with the base to a static reference structure. The positioning arm further comprises a first and a second arm member extending from the base, the second arm member extending parallel to the first arm member. The arm comprises a bridge member at a second end thereof, connecting the first and the second arm members. The first and the second arm member are respectively connected to each one of said base and said bridge member by means of a hingeable connection. The positioning arm further comprises an actuator for inducing a relative displacement between the first and the second arm member in a longitudinal direction of said first and second arm member for swinging the second end of the positioning arm in a direction transverse to the lateral displacement. The bridge member comprises a support for supporting the scan head.

Positioning arm for and method of placing a scan head on a support surface

A scanning probe microscopy system for mapping nanostructures on a surface of a sample, comprises a metrology frame, a sensor head including a probe tip, and an actuator for scanning the probe tip relative to the sample surface. The system comprises a clamp for clamping of the sample, which clamp is fixed to the metrology frame and arranged underneath the sensor head. The clamp is arranged for locally clamping of the sample in a clamping area underneath the probe tip, the clamping area being smaller than a size of the sample such as to clamp only a portion of the sample. Moreover, a metrology frame for use in scanning probe microscopy system as described includes a clamp for clamping of a sample, wherein the clamp is fixed to the metrology frame such as to be arranged underneath the sensor head.

Scanning probe microscopy system for mapping nanostructures on a surface of a sample and metrology frame therefore

A scanning probe microscopy system for mapping nanostructures on a surface of a sample is described. The nanostructures include at least one face having a slope with a slope angle that exceeds a threshold. The system includes a metrology frame, a sample support structure, a sensor head including a probe which includes a cantilever and a probe tip, and an actuator for scanning the probe tip relative to the substrate surface. For sensing the nanostructures, the probe tip is arranged under a fixed offset angle with respect to the sensor head such as to be angled relative to the sample surface. The system further includes a sensor head carrier for receiving the sensor head, the sensor head carrier and the sensor head being provided with a mutually cooperating mounting structure for forming a kinematic mount having at least three contact points for detachable mounting of the sensor head on the sensor head carrier.

Scanning probe microscopy system for mapping high aspect ratio nanostructures on a surface of a sample

The invention is directed at a method of performing scanning probe microscopy on a substrate surface using a scanning probe microscopy system, the system including at least one probe head, the probe head comprising a probe tip arranged on a cantilever and a tip position detector for determining a position of the probe tip along a z-direction transverse to an image plane, the method comprising: positioning the at least one probe head relative to the substrate surface; moving the probe tip and the substrate surface relative to each other in one or more directions parallel to the image plane for scanning of the substrate surface with the probe tip; and determining the position of the probe tip with the tip position detector during said scanning for mapping nanostructures on the substrate surface; wherein said step of positioning is performed by placing the at least one probe head on a static carrier surface.

System and method of performing scanning probe microscopy on a substrate surface

The disclosure concerns an actuator module () for actuating a load (). The actuator module () comprises a deformable frame () and an actuator () connected to the deformable frame (). A time-varying force distribution (F) couples to an excited state (V) of an eigenmode (V) of the deformable frame (). The force distribution (F), as well as a stiffness distribution (K) and/or mass distribution (M) of the deformable frameare adapted such that static nodal points () of the deformable frameare coincided with mode nodal points (). The locations where the nodal points coincide can be used to connect the actuator module () to a base frame to reduce transfer of vibrations to the base frame and back which may otherwise undesirably influence the transfer function from actuator to load. The disclosure further concerns a method for designing and/or manufacturing the actuator module.

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's-Gravenhage, Netherlands

William Edward Crowcombe