Carl Zeiss X-ray Microscopy, Inc.

Lam Research Corporation

Government of the United States of America, As Represented by the Secretary of Commerce

William Dean Thompson

Matthew Andrew

Zhifeng Huang

Jin Zhang

Osman Sorkhabi

Daniel F Sunday

Xiaoshu Chen

Regis Joseph Kline

Wenli Wu

A x-ray micro tomography system provides the ability to proscriptively determine regularization parameters for iterative reconstruction of a sample, from projection data of the sample. This allows a less experienced operator to determine the regularization parameters with adequate precision.

System and method for the proscriptive determination of parameters for iterative reconstruction

IR radiation may be used to examine substrates prior to a fabrication operation in order to adjust processing parameters of the fabrication operation, or to determine features of the substrate. A thermographic image may be collected and provided to a transfer function or machine learning model to determine processing parameters or features. The processing parameters may improve the uniformity of the wafer and/or achieve a desired target feature value.

Thermal imaging for within wafer variability feedforward or feedback information

Provided herein are methods and apparatus for characterizing high aspect ratio (HAR) structures of fabricated or partially fabricated semiconductor devices. The methods involve using small angle X-ray scattering (SAXS) to determine average parameters of an array of HAR structures. In some implementations, SAXS is used to analyze symmetry of HAR structures in a sample and may be referred to as tilted structural symmetry analysis-SAXS (TSSA-SAXS) or TSSA. Analysis of parameters such as tilt, sidewall angle, bowing, and the presence of multiple tilts in HAR structures may be performed.

Determining tilt angle in patterned arrays of high aspect-ratio structures by small-angle x-ray scattering

X-ray microscopy tomography scanning systems are not constrained by continuous scanning trajectories like in medical scanners. In fact, the source and detector can be held stationary during subsequent image capture producing a discrete sampling pattern. For such systems, a method of producing an optimized, even illumination of the object by choosing source/detector locations on a surface of an imaginary cylinder surrounding the object is disclosed. The locations, in one example, form a regular lattice with even coverage on the surface of that cylinder, rather than at locations along a continuous curve such as a helix. Using this method, the effective pitch may be increased beyond the theoretical limit imposed by helical scanning, allowing a greater range of y-axis coverage for the same number of projection angles, corresponding to an increase in throughput.

X-ray CT microscopy system and method utilizing lattice sampling

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Pleasanton, CA, United States of America

William Dean Thompson