Hughes Aircraft Company

Other

International Business Machines Corporation

Hughes Danbury Optical Systems, Inc.

Plasmasil, LLC

William D Taylor

Luis Jesus Matienzo

Thomas R Miller

Gerald Walter Jones

Anastasios Peter Angelopoulos

The present invention comprises a method of making a circuitized structure. The method comprises the steps of providing a substrate coated with a polymeric dielectric layer, treating the substrate with alkali, baking the substrate to modify the surface of the polymeric dielectric layer, applying a seed layer to the polymeric dielectric layer and applying conductive layer to the seed layer. The invention also comprises a printed circuit structure produced by the method of the present invention.

Method of uniformly depositing seed and a conductor and the resultant printed circuit structure

The present invention comprises a method of making a circuitized structure. The method comprises the steps of providing a substrate coated with a polymeric dielectric layer, treating the substrate with alkali, baking the substrate to modify the surface of the polymeric dielectric layer, applying a seed layer to the polymeric dielectric layer and applying a conductive layer to the seed layer. The invention also comprises a printed circuit structure produced by the method of the present invention.

Method of uniformly depositing seed and a conductor and the resultant

A novel gas discharge apparatus for use in a plasma etching system is disclosed. Several components of the gas discharge apparatus including the annular outer chimney, annular outer chimney clamp and annular insulator collar are modified to allow increased egress of particulate matter generated by the etching process away from the substrate being figured. This increased egress results in a significant reduction of contaminants contacting the substrate surface.

Gas discharge apparatus for wafer etching systems

A plasma assembly including an RF head extending into a vacuum chamber and an associated electrode for generating a confined plasma. The assembly includes a sidewall within the chamber forming a plenum about the RF head. The plenum defines a volume substantially smaller than the volume of the chamber and hence, the gas pressure within the plenum is more easily monitored and controlled by the provision of make-up gas.

Plasma pressure control assembly

A fluid mixer has a plurality of inlet conduits extending into a chamber and being directed toward a common location on a first surface of the chamber.

Fluid mixer

An internally-cooled optical device 10 includes a manifold 14 having two oppositely disposed coolant input ports 18 and two oppositely disposed coolant output ports 20. The input and output ports are positioned perpendicular to each other. The input coolant flow is divided into macro-channels 28, with each macro-channel having an associated plurality of micro-channels 34 for carrying the coolant along a surface juxtaposed with a surface of the optical device faceplate. The micro-channels terminate in an exit plenum 36 of the macro channel. The exit plenum tapers down to an orifice 38 connected to a return header 42 for delivering the coolant to the outlet ports. The orifices of the macro-channels are sized according to the length of the micro-channels used in the macro-channel, so that each macro-channel has essentially the same pressure drop, and uniform coolant flow is provided in each macro-channel.

Cooling apparatus for optical devices

A monochromator 18 has a thin faceplate which reduces temperature-induced distortion in a strain-free region by placing it close to a two-level heat exchanger 46, 64. The heat exchanger has a first level 46 in juxtaposition with the faceplate 22 for efficient heat extraction, and a second level 64 which establishes a constant temperature plane along a neutral bending axis of the monochromator 18. The first level heat exchanger is operated at a temperature below the zero CTE point of the silicon faceplate so that the integrated CTE of the faceplate is approximately zero. Pumps 30 and 32 are disposed respectively at the coolant inlets 26 and outlets 28 for fine-tuning the coolant pressure so that a minimal pressure across the faceplate 22 may be established to minimize bending moments on the thin faceplate. The upper and lower heat exchangers 46, 64 are comprised of a plurality of micro-channels which are divided into groups, each group associated with a macro-channel 40, 60 and a return plenum 48, 68 which tapers down to an orifice 50, 72, which is connected to a return header 52, 74. The sizes of the orifices 50, 72 may be adjusted to control the amount of coolant flow through each macro channel so that the cooling provided may be matched to the heat absorbed by the faceplate.

Low surface distortion monochromator

A rotary closet wardrobe mounted on a vertical column extending from floor to ceiling of a clothes closet having three rows of drawers on the top portion. Immediately below the drawers a horizontal bar supports an elliptical shaped horizontal clothes hanger rod providing rotational clearance for clothes suspended on clothes hangers in the typical modern home closet. Beneath the clothes hanger a cylindrical structure having two vertical layers of bins rotatable around the vertical column mounted on the floor of the closet.

Rotary closet wardrobe

A safety vehicle provides a hub and rim construction in which a central hub comprises part of a passenger shell. A rim surrounds the shell and is connected thereto by a multiplicity of spoke like members. The rim is larger and elongate relative to the hub to provide an engine compartment and trunk between the hub and the rim. Inverted scroll shaped dashboards face the front and rear seats to provide crash protection for the occupants.

Growing community of inventors

Sandy Hook, CT, United States of America

William D Taylor