Average Co-Inventor Count = 9.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Corporation (2 from 3,785 patents)
2 patents:
1. 9546432 - Dense oxide coated component of a plasma processing chamber and method of manufacture thereof
2. 9123651 - Dense oxide coated component of a plasma processing chamber and method of manufacture thereof