Other

Star Tech Instruments, Inc.

Taunton Technologies, Inc.

William C Fricke

William B Telfair

Clifford A Martin

Eugene I Gordon

Mike Ganopoulos

Michael Ganopoulos

The fluorescent response of a UV radiometer to a UV beam is normalized over an entrance aperture area by using a plurality, preferably two, converting plates. The fluorescent response of at least two and preferably a plurality of crystal converting plates is ascertained. Crystal converting plates having complementary responses are selected and placed adjacently in the entrance aperture area such that an incident UV beam will cause a net complementary fluorescent response from the combined first and second crystal converting plates that is less varying over the entrance aperture area than the respective fluorescent responses of the individual first and second crystal converting plates.

Uniformly responsive ultraviolet sensors

An imaging apparatus for DUV beams is provided which includes a lens for receiving a DUV beam and producing an image of the DUV beam, wherein the lens has an aplanatic surface and a hemispheric surface, and wherein at least the aplanatic surface is made from or otherwise has a down-converting medium for producing a down-converted beam; an image sensing member for viewing an image of the down-converted beam; and optics for relaying the image of the down-converted beam from the lens to the image sensing member. A processor can be communicated with the image sensing member for analyzing the image of the DUV beam.

Apparatus for viewing and analyzing ultraviolet beams

A position sensor for ultraviolet beams includes a beam positioning member for directing an ultraviolet beam along a path; a downconverter member for converting the beam to visible light; a position sensing member for sensing position of visible light thereon; and relay optics for directing the visible light to the position sensing member; wherein the position sensing member is communicated with the beam positioning member for conveying information regarding position of the visible light to the beam positioning member.

Position sensor for ultraviolet and deep ultraviolet beams

A device for scanning a linear section of a UV beam to determine the local intensity thereof along the linear section. The UV beam impinges upon flourescent material and the fluorescent emission distribution is meausred to indicate the UV beam intensity.

Line scanner

An ultraviolet radiometer converts UV radiation to fluorescent radiation. An optical signal corresponding to the intensity of detected fluorescent radiation is converted to an electrical signal corresponding to the power or energy of the detected fluorescent emission. A monitoring element receives the electrical signal and monitors the power or energy of the UV radiation.

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New Fairfield, CT, United States of America

William C Fricke