Other

William B Hugle

Hans Peter Herzig

Rene Dandliker

Manufacture of flat panel displays

Microlithography techniques have provided a means for the development of many useful devices from microcircuits, which made the computer era possible, to micromechanical devices such as motors that are only a few tens of microns across. A new use of a microdevice is presented here which serves to 'payback' the art of microlithography as it is a significant contribution thereto. The device of the invention is a unique microdevice made with advanced microlithography techniques which when completed can be used as a new exposure tool for microlithography. A lens array can be as thin as 1/40 of the thickness of the page that this text is printed on, yet have thereon an arrangement of optical lenses powerful enough to replace very sophisticated and bulky, million dollar precision optics. An array of lenses can be fabricated with binary optical device and other techniques. The array having unlimited area and field of regard can be used as an exposure tool for very large area microdevices such as flat panel displays without the requirement of step and repeat operations which severely limit the throughput and yield in modern manufacturing methods.

Lens array photolithography

A method of manufacturing an optical memory disc, which includes the steps of forming a volume holographic image on a recording medium by interference between an object beam (OB) of coherent light after passage through a mask and a reference beam (RB1) of coherent light, which is totally internally reflected at a surface on which the recording medium is disposed. Thereafter, the mask is replaced by the optical memory disc and formed on a photoresist or other photo-sensitive coating thereof is an image of the holographic recording using a second reference beam (RB2) replayed in the opposite direction from the first reference beam (RB1).

Growing community of inventors

Neuchatel, Switzerland

William B Hugle