Hewlett-packard Development Company, L.p.

Hewlett-packard Company

William A Keese

Manish Giri

Mohammed Saad Shaarawi

Jeremy Harlan Donaldson

Thomas R Strand

Randall Orson Willard

A method of manufacturing a fluid ejection device includes providing a barrier layer and an orifice layer on a substrate, laminating a layer of photo-resist over a substantially planar surface of the orifice layer, forming an orifice in the orifice layer, and forming a counterbore in the layer of photo-resist, with forming a counterbore in the layer of photo-resist including exposing a portion of the substantially planar surface of the orifice layer within the counterbore.

Method of manufacturing fluid ejection device with dry-film photo-resist layer

Methods of manufacturing a fluid ejection device comprise, in one embodiment, forming filler structures on a substrate and laminating a dry film onto the substrate over the filler structures. The dry film defines a barrier layer around the filler structures and an orifice layer above the filler structures. The filler structures are removed to form voids within the barrier layer.

Method of manufacturing a fluid ejection device with a dry-film photo-resist layer

A border of a circular specimen defining a high contrast feature is imaged. Multiple border portions are sampled at a magnification showing each portion as a straight edge. For alignment a location indicator signal is generated at each of minimum and maximum focal range. Image translation is detected from the two signals, and alignment automatically adjusted. The process repeats for subsequent border portions at a 90.degree. interval until image translation falls for a sample is less than a threshold. For astigmatism correction border portions are sampled about the entire specimen circumference at a 30.degree. interval. An axis of beam distortion is identified based upon a maximum image translation axis among the samples. Distortion is adjusted along such axis. Then, astigmatism connection signal strength is indexed and astigmatism correction is repeated iteratively until correction for a current iteration is less than a given threshold.

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Philomath, OR, United States of America

William A Keese