Peak Systems, Inc.

William A Eddy

Apparatus and a method for transferring one or more workpieces from a first location to a second location in an automated fashion. The apparatus includes a wafer transfer arm having a vacuum means at one end thereof for removable attachment to the underside of a workpiece to cause the workpiece to be moved from a first location to a second location. The transfer arm is coupled at the opposite end thereof to a post which is coupled to drive means for moving the arm in three degrees of freedom, namely along an X direction, along a Z direction and in a rotative direction. A reversible drive motor is provided for each degree of freedom and the motors are mounted on a carriage in a manner such that the motors can be simultaneously actuated under the control of a computerized control means. Thus, with a program coupled to the control means, the transfer arm can be made to perform a series of steps sequentially to move one or more workpieces from a first location, such as a wafer cassette, to a processing station.

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Fremont, CA, United States of America

William A Eddy