Applied Materials, Inc.

Other

Etec Systems, Inc.

Etec System, Inc.

William A Eckes

Jeffrey S Sullivan

Kurt Stephen Werder

Dieter Winkler

Yacov Elgar

Robert Innes

Thomas Jasinski

Daniel B DeBra

Patrick D Duane

Rushford Ogden

Improved systems, apparatus, and methods for detecting positions of moving stages and a reference position of a beam column are provided. For some embodiments, independent discrete interferometers may be utilized for distance measurements in each axis, rather than a cumbersome monolithic multi-axis interferometer utilized in conventional systems.

Multi-axis interferometer system using independent, single axis interferometers

Embodiments of the invention generally provide a substrate support assembly. In one embodiment, a substrate support assembly includes a substrate support plate, a thermal regulating plate coupled in a spaced-apart relation to the substrate support plate and a main actuator coupled in a spaced-apart relation to the thermal regulating plate. The main actuator is adapted to move the substrate support plate laterally. The substrate support assembly is configured to limit the thermal influence of the main actuator on a substrate positioned on the substrate support plate.

Substrate support assembly with thermal isolating plate

We have developed a method and apparatus for cooling electromagnetic lens coils of the kind used in charged particle beams. The method and apparatus provide not only a symmetrical cooling effect around the optical axis of the charged particle beam, but also provide improved uniformity of heat transfer. This improved uniformity enables control over the optical axis of the charged particle beam within about 1 nm for high current charged particle beam columns, wherein the current ranges from about 100 nanoamps to about 1000 nanoamps. The use of a squat and wide electromagnetic lens coil in combination with an essentially flat modular cooling panel, which provides uniform cooling to the electromagnetic lens coil, not only enables control over the optical axis of the charged particle beam, but also provides mechanical stability for the charged particle beam column.

Cooling module for charged particle beam column elements

A laser beam or other parallel light beam divides at a beamsplitter into sample and reference beams. The sample beam reflects from a reflective surface back to the beamsplitter, and the reference beam reflects from a retroreflector back to the beamsplitter. The beams are then directed into a telescope. The angle between sample and reference beams at the telescope is proportional to the angle between the laser beam and the normal to the reflective surface. The telescope collects both sample beam and reference beam and transforms each beam into a sharply defined point image. The lateral separation between the two point images is proportional to the magnification of the telescope and to the angle formed at the telescope between the sample beam and the reference beam. If the reflective surface is accurately aligned relative to the laser beam, then the two point images are substantially superposed on one another. Alignment is performed by adjusting the orientation of the reflective surface, until the lateral separation between the two point images reaches zero or a predetermined value.

Laser reflector alignment

A laminar flow diffuser has a plurality of round, thin, stacked plates. A central bore penetrates all the plates with the exception of the bottom plate. The diffuser is secured to the vacuum chamber port. When gas enters the port, it enters the central bore and then flows radially outward through the interplate spaces to the outer circumference of the plates and subsequently into the periphery of the chamber. The diffuser thereby provides a controlled laminar flow which prevents turbulence in the chamber and hence, reduces the possibility of contamination to the workpiece in the chamber. The laminar flow diffuser is easily cleaned, both during its initial assembly and later after use, because it chiefly has flat surfaces which do not harbor dirt or gas.

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Castro Valley, CA, United States of America

William A Eckes