Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno

Ac Optomechanix

Wimoptik B.v.

Willem Dirk Van Amstel

Leonard Antonino Cacace

Rens Henselmans

In an optical distance sensor for measuring object surfaces with high precision and comprising an objective lens for focusing a measuring beam to a measuring spot on the surfaces, measuring errors due to tilt of an object surface can be detected by using a pupil monitor, which senses the radiation intensity distribution of the reflected measuring beam effectively in the pupil of the objective lens to generate a tilt signal, which can be supplied to a correction/calibration table to obtain a correction signal, which is suitable for correcting the primary distance measuring signal of the sensor. Especially for a differential confocal distance sensor having pinholes arranged in front of radiation-sensitive detectors, a further order of correction can be obtained by determining optimum position and diameter of these pinholes.

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Geldrop, Netherlands

Willem Dirk Van Amstel