Ams International Ag

Nxp B.v.

Datang Nxp Semiconductors Co., Ltd.

Willem Besling

Peter G Steeneken

Olaf Wunnicke

Casper Van Der Avoort

Martijn Goossens

Marten Oldsen

Remco Henricus Wilhelmus Pijnenburg

Johannes Van Lammeren

Jozef Van Beek

Remco Pijnenburg

Jinesh Kochupurackal

Marten Oldson

Iris Bominaar-Silkens

Reinout Woltjer

Peter Steeneken

Klaus Reimann

Aspects of the present disclosure are directed to force sensors. As may be implemented in accordance with one or more embodiments, an apparatus includes a force-responsive component having a resonant frequency, and a circuit that compensates for variations with the force-responsive component. The force-responsive component moves in response to an applied force, in accordance with a spring constant that is susceptible to fluctuation. The compensation circuit determines Brownian motion of the force-responsive component at the resonant frequency based on temperature, and generates an output based on the determined Brownian motion and movement of the force-responsive component. Such an output is indicative of force applied to the apparatus.

Force sensor with compensation

Various exemplary embodiments relate to a device to measure carbon dioxide (CO) levels, including a first oscillator group comprising a first sensor to measure air pressure, where the first sensor comprises a first sealed membrane, and where the first sealed membrane overlays a sealed first cavity; a second oscillator group including a second sensor to measure the resonance frequency of a second unsealed oscillating membrane, and where the second unsealed membrane overlays a second cavity in contact with the air outside of the second sensor; and a mixer accepting as input a first frequency measurement output from the first oscillator group and a second frequency measurement output from the second oscillator group, outputting the difference of the first frequency measurement and the second frequency measurement, and computing a carbon dioxide measurement based on the difference.

Resonant CO2 sensing with mitigation of cross-sensitivities

Various exemplary embodiments relate to a pressure sensor including a pressure sensitive membrane suspended over a cavity, wherein the membrane is secured by a set of anchors to a substrate; and a getter material embedded in the membrane, wherein the surface of the getter is in contact with any gas within the cavity, and wherein two end points of the getter material are attached through the substrate by anchors capable of conducting through the substrate an electrical current through the getter material.

Pressure sensor with geter embedded in membrane

Embodiments of a method for forming a suspended membrane include depositing a first electrically conductive material above a sacrificial layer and within a boundary trench. The first electrically conductive material forms a corner transition portion above the boundary trench. The method further includes removing a portion of the first electrically conductive material that removes at least a portion of uneven topography of the first electrically conductive material. The method further includes depositing a second electrically conductive material. The second electrically conductive material extends beyond the boundary trench. The method further includes removing the sacrificial layer through etch openings and forming a cavity below the second electrically conductive material. The first electrically conductive material defines a portion of a sidewall boundary of the cavity.

Suspended membrane for capacitive pressure sensor

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Eindhoven, Netherlands

Willem Besling