Asml Netherlands B.v.

Willem Arie Van Helden

Franciscus Johannes Joseph Janssen

Tjarko Adriaan Rudolf Van Empel

Lun Kai Cheng

Marcel Johannus Elisabeth Hubertus Muitjens

Evert Nieuwkoop

Roger Wilhelmus Antonius Henricus Schmitz

Frederik Van Der Graaf

Richard Versluis

Johannes Fransiscus Maria Velthuis

Axel Sebastiaan Lexmond

Paulus Bartholomeus Johannes Schaareman

Charles William Barras Potts

Martinus Henricus Johannes Lemmen

Mathilde Gertrudis Maria De Kroon

A method for thermally conditioning an optical element includes irradiating the optical element with radiation, not-irradiating the optical element with the radiation, allowing heat flow between the optical element and a conditioning fluid that is held in a conditioning fluid reservoir, and providing a fluid flow of the conditioning fluid, to supply thermally conditioned fluid to the reservoir. A flow rate of the fluid during the irradiating of the optical element is lower than a flow rate of the fluid when the optical element is not-irradiated.

Method and system for thermally conditioning an optical element

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Bergschenhoek, Netherlands

Willem Arie Van Helden