Asml Netherlands B.v.

Wilhelmus Antonius Wernaart

Erik Henricus Egidius Catharina Eummelen

Cornelius Maria Rops

Ronald Van Der Ham

Giovanni Luca Gattobigio

David Bessems

Victor Manuel Blanco Carballo

Walter Theodorus Matheus Stals

Frederik Antonius Van Der Zanden

A fluid handling structure for a lithographic apparatus configured to contain immersion fluid to a region, the fluid handling structure having, at a boundary of a space: at least one gas knife opening in a radially outward direction of the space; and at least one gas supply opening in the radially outward direction of the at least gas knife opening relative to the space. The gas knife opening and the gas supply opening both provide substantially pure COgas so as to provide a substantially pure COgas environment adjacent to, and radially outward of, the space.

Fluid handling structure, a lithographic apparatus and a device manufacturing method

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Veldhoven, Netherlands

Wilhelmus Antonius Wernaart