Carl Zeiss Microscopy Gmbh

Carl Zeiss Microimaging Gmbh

Balzers Und Leybold Deutschland Holding Ag

Gretag-macbeth Ag

Carl Zeiss Jena Gmbh

Carl Zeiss Spectroscopy Gmbh

Wilhelm Schebesta

Nico Correns

Michael Rode

Peter Ehbets

Adrian Von Orelli

Werner Hoyme

Lutz Freytag

Jens Mondry

Martin Goetz

Martin Götz

Eckard Vasold

Jurgen Gobel

Peter Kappel

Ulrich Basler

Christian Schaffer

Walter Muller

Werner Lenz

Eckhard Vasold

The description relates to a standard for wavelength and intensity for spectrometers, particularly for calibrating and testing measurement heads in spectrometers which are usable primarily in the near infrared region (NIR) of the spectrum. The standard comprises a holder and a plate body arranged in the holder. The plate body is made of transparent plastic with high strength and dimensional stability over a large temperature range. The plastic has distinct absorption bands throughout the entire NIR range and has a chemical structure and composition ensuring an extensive moisture barrier against water absorption and water release in a reliable and stable manner over time. The plate body advantageously comprises an amorphous, transparent copolymer based on cyclic and/or linear olefins.

Standard for wavelength and intensity for spectrometers

An arrangement for measuring the diffuse reflection of samples and a method for internal recalibration of the measuring head. The spectrometric measuring head with a device for recalibration comprises a housing which is provided with a window and which contains an illumination source, a spectrometer arrangement and at least two standards for internal recalibration. The two standards can be swiveled into the beam path of the measuring head selectively so that the measurement light emitted by the illumination source can be used in its entirety for recalibration. A processor for acquiring and processing measured values and an interface to a bus system are arranged in the housing. Accordingly, relatively time-consuming calibration of the measuring head at the place of use is required only before putting into operation or at longer time intervals. By the internal recalibrations, it is possible to prevent changes in the measured values in long-term operation.

Spectrometric measuring probe and method for recalibrating the same

A spectrometer is provided having a carrier, a light input for measurement light disposed on the carrier, a diffraction grating disposed on the carrier for dispersing the measurement light received from the light input, an opto-electronic detector disposed on the carrier for receiving and detecting the measurement light dispersed by the diffraction grating, at least one optical component for imaging the measurement light on the detector through the diffraction grating, a base board fastened to said carrier for supporting the opto-electronic detector, wherein the opto-electronic detector is fastened at a predetermined position on the base board, and wherein the base board and the carrier include positioning members for relatively positioning the base board on the carrier in a predetermined position. Preferably, the detector is a detector chip excluding a housing and fastened in a predetermined position on the base board. Both, carrier and base board have cooperating positioning members for positioning the base board on the carrier. The base board is preferably an electronic circuit board being fastened to the carrier in such a manner so as to allow a thermal expansion, and wherein the position of the fastening point P relative to the position of the detector on the base board is chosen such that the thermal expansion of the base board substantially compensates the drift of the spectral light component relative to the detector for at least an intermediate wavelength of the measured spectrum, the drift being caused by the thermal expansion of the diffraction grating and the carrier. In addition, the materials of the carrier, the base board, and the diffraction grating are selected with respect to their thermal expansion coefficients such that the temperature drift of the spectrum is substantially compensated for the entire measured spectrum. For most applications, the spectrometer is also sufficiently temperature compensated when using plastic components and is easily and economically produced.

Spectrometer

Optical measuring apparatus for determining chromaticity of thin films on a substrate includes a light source for illuminating the substrate and a measuring apparatus for dispersing light into various wavelengths and making wavelength dependent intensity measurements. Radiation from the light source is reflected or transmitted by the substrate to the measuring apparatus along a first beam path having a first diaphragm for cutting off the radiation from the substrate in a leak-tight manner. Radiation from the light source is also transmitted to the measuring apparatus directly along a second beam path having a second diaphragm for cutting off radiation from the light source in a leak-tight manner. The light source (6a) consists of a globe photometer (6a), in which a lamp (4) is provided. A steadily burning light source, especially a halogen lamp, is used as the lamp (4). Long-term instabilities are corrected essentially by means of a white reference standard, whereas short-term instabilities are corrected under consideration of the characteristic emission spectrum of the selected lamp (4). For determining the chromaticity of reflecting and transparent thin-film layers applied to substrate, a process for reflectance curve determination is used, in which apparatus-related instabilities interfering with the chromaticity measurement are corrected by normalization of the measured relative spectral energy distributions to the current measurement light spectrum and by taking into consideration the effects of foreign light on the measurement light spectrum.

Process and apparatus for spectral reflectance and transmission

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Jena, Germany

Wilhelm Schebesta