Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl Zeiss Smt Gmbh (1 from 1,410 patents)
2. Carl Zeiss Microscopy Gmbh (1 from 706 patents)
1 patent:
1. 11378532 - Inspection system and inspection method to qualify semiconductor structures